11/17/2010	9:18:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/17/2010	9:18:37 AM	Recipe started at 9:18 AM
11/17/2010	9:18:37 AM	H2 valve closed
11/17/2010	9:18:37 AM	BCl3 valve closed
11/17/2010	9:18:37 AM	PH3 valve closed
11/17/2010	9:18:37 AM	SiCl4 pre valve closed
11/17/2010	9:18:37 AM	SiCl4 post valve closed
11/17/2010	9:18:37 AM	Main Vac valve closed
11/17/2010	9:18:37 AM	Bypass valve closed
11/17/2010	9:18:37 AM	Bubbler valve closed
11/17/2010	9:18:37 AM	Helium valve opened
11/17/2010	9:18:37 AM	Helium MFC set to  500.000000
11/17/2010	9:18:37 AM	H2 MFC set to  0.000000
11/17/2010	9:18:37 AM	BCl3 MFC set to  0.000000
11/17/2010	9:18:37 AM	PHl3 MFC set to  0.000000
11/17/2010	9:18:37 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:18:37 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:18:37 AM	Tube furnace set to 0
11/17/2010	9:19:58 AM	Helium valve closed
11/17/2010	9:19:58 AM	H2 valve closed
11/17/2010	9:19:58 AM	BCl3 valve closed
11/17/2010	9:19:58 AM	PH3 valve closed
11/17/2010	9:19:58 AM	SiCl4 pre valve closed
11/17/2010	9:19:58 AM	SiCl4 post valve closed
11/17/2010	9:19:58 AM	Main Vac valve closed
11/17/2010	9:19:58 AM	Bypass valve closed
11/17/2010	9:19:58 AM	Bubbler valve closed
11/17/2010	9:19:58 AM	Helium MFC set to  0.000000
11/17/2010	9:19:58 AM	H2 MFC set to  0.000000
11/17/2010	9:19:58 AM	BCl3 MFC set to  0.000000
11/17/2010	9:19:58 AM	PHl3 MFC set to  0.000000
11/17/2010	9:19:58 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:19:58 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:19:58 AM	Tube furnace set to 0
11/17/2010	9:19:58 AM	Run finished at 9:19 AM
11/17/2010	9:19:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/17/2010	9:28:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2010	9:28:49 AM	Recipe started at 9:28 AM
11/17/2010	9:28:49 AM	Helium valve closed
11/17/2010	9:28:49 AM	H2 valve closed
11/17/2010	9:28:49 AM	BCl3 valve closed
11/17/2010	9:28:49 AM	PH3 valve closed
11/17/2010	9:28:49 AM	SiCl4 pre valve closed
11/17/2010	9:28:49 AM	SiCl4 post valve closed
11/17/2010	9:28:49 AM	Main Vac valve closed
11/17/2010	9:28:49 AM	Bubbler valve closed
11/17/2010	9:28:49 AM	Bypass valve opened
11/17/2010	9:28:49 AM	Helium MFC set to  0.000000
11/17/2010	9:28:49 AM	H2 MFC set to  0.000000
11/17/2010	9:28:49 AM	BCl3 MFC set to  0.000000
11/17/2010	9:28:49 AM	PHl3 MFC set to  0.000000
11/17/2010	9:28:49 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:28:49 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:28:49 AM	Tube furnace set to 0
11/17/2010	9:29:40 AM	Helium valve closed
11/17/2010	9:29:40 AM	H2 valve closed
11/17/2010	9:29:40 AM	BCl3 valve closed
11/17/2010	9:29:40 AM	PH3 valve closed
11/17/2010	9:29:40 AM	SiCl4 pre valve closed
11/17/2010	9:29:40 AM	SiCl4 post valve closed
11/17/2010	9:29:40 AM	Bubbler valve closed
11/17/2010	9:29:40 AM	Main Vac valve opened
11/17/2010	9:29:40 AM	Bypass valve opened
11/17/2010	9:29:40 AM	Helium MFC set to  0.000000
11/17/2010	9:29:40 AM	H2 MFC set to  0.000000
11/17/2010	9:29:40 AM	BCl3 MFC set to  0.000000
11/17/2010	9:29:40 AM	PHl3 MFC set to  0.000000
11/17/2010	9:29:40 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:29:40 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:29:40 AM	Tube furnace set to 0
11/17/2010	9:29:40 AM	Run finished at 9:29 AM
11/17/2010	9:29:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2010	9:29:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	9:30:04 AM	Recipe started at 9:29 AM
11/17/2010	9:30:04 AM	Helium valve closed
11/17/2010	9:30:04 AM	H2 valve closed
11/17/2010	9:30:04 AM	BCl3 valve closed
11/17/2010	9:30:04 AM	PH3 valve closed
11/17/2010	9:30:04 AM	SiCl4 pre valve closed
11/17/2010	9:30:04 AM	SiCl4 post valve closed
11/17/2010	9:30:04 AM	Main Vac valve closed
11/17/2010	9:30:04 AM	Bubbler valve closed
11/17/2010	9:30:04 AM	Bypass valve opened
11/17/2010	9:30:04 AM	Helium MFC set to  0.000000
11/17/2010	9:30:04 AM	H2 MFC set to  0.000000
11/17/2010	9:30:04 AM	BCl3 MFC set to  0.000000
11/17/2010	9:30:04 AM	PHl3 MFC set to  0.000000
11/17/2010	9:30:04 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:30:04 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:30:04 AM	Tube furnace set to 0
11/17/2010	9:30:05 AM	Helium valve closed
11/17/2010	9:30:05 AM	H2 valve closed
11/17/2010	9:30:05 AM	BCl3 valve closed
11/17/2010	9:30:05 AM	PH3 valve closed
11/17/2010	9:30:05 AM	SiCl4 pre valve closed
11/17/2010	9:30:05 AM	SiCl4 post valve closed
11/17/2010	9:30:05 AM	Bubbler valve closed
11/17/2010	9:30:05 AM	Main Vac valve opened
11/17/2010	9:30:05 AM	Bypass valve opened
11/17/2010	9:30:05 AM	Helium MFC set to  0.000000
11/17/2010	9:30:05 AM	H2 MFC set to  0.000000
11/17/2010	9:30:05 AM	BCl3 MFC set to  0.000000
11/17/2010	9:30:05 AM	PHl3 MFC set to  0.000000
11/17/2010	9:30:05 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:30:05 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:30:05 AM	Tube furnace set to 0
11/17/2010	9:31:05 AM	H2 valve closed
11/17/2010	9:31:05 AM	BCl3 valve closed
11/17/2010	9:31:05 AM	PH3 valve closed
11/17/2010	9:31:05 AM	SiCl4 pre valve closed
11/17/2010	9:31:05 AM	SiCl4 post valve closed
11/17/2010	9:31:05 AM	Bubbler valve closed
11/17/2010	9:31:05 AM	Helium valve opened
11/17/2010	9:31:05 AM	Main Vac valve opened
11/17/2010	9:31:05 AM	Bypass valve opened
11/17/2010	9:31:05 AM	Helium MFC set to  100.000000
11/17/2010	9:31:05 AM	H2 MFC set to  0.000000
11/17/2010	9:31:05 AM	BCl3 MFC set to  0.000000
11/17/2010	9:31:05 AM	PHl3 MFC set to  0.000000
11/17/2010	9:31:05 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:31:05 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:31:05 AM	Tube furnace set to 0
11/17/2010	9:32:05 AM	Helium valve closed
11/17/2010	9:32:05 AM	H2 valve closed
11/17/2010	9:32:05 AM	BCl3 valve closed
11/17/2010	9:32:05 AM	PH3 valve closed
11/17/2010	9:32:05 AM	SiCl4 pre valve closed
11/17/2010	9:32:05 AM	SiCl4 post valve closed
11/17/2010	9:32:05 AM	Bubbler valve closed
11/17/2010	9:32:05 AM	Main Vac valve opened
11/17/2010	9:32:05 AM	Bypass valve opened
11/17/2010	9:32:05 AM	Helium MFC set to  0.000000
11/17/2010	9:32:05 AM	H2 MFC set to  0.000000
11/17/2010	9:32:05 AM	BCl3 MFC set to  0.000000
11/17/2010	9:32:05 AM	PHl3 MFC set to  0.000000
11/17/2010	9:32:05 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:32:05 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:32:05 AM	Tube furnace set to 0
11/17/2010	9:33:05 AM	H2 valve closed
11/17/2010	9:33:05 AM	BCl3 valve closed
11/17/2010	9:33:05 AM	PH3 valve closed
11/17/2010	9:33:05 AM	SiCl4 pre valve closed
11/17/2010	9:33:05 AM	SiCl4 post valve closed
11/17/2010	9:33:05 AM	Bubbler valve closed
11/17/2010	9:33:05 AM	Helium valve opened
11/17/2010	9:33:05 AM	Main Vac valve opened
11/17/2010	9:33:05 AM	Bypass valve opened
11/17/2010	9:33:05 AM	Helium MFC set to  100.000000
11/17/2010	9:33:05 AM	H2 MFC set to  0.000000
11/17/2010	9:33:05 AM	BCl3 MFC set to  0.000000
11/17/2010	9:33:05 AM	PHl3 MFC set to  0.000000
11/17/2010	9:33:05 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:33:05 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:33:05 AM	Tube furnace set to 0
11/17/2010	9:34:06 AM	Helium valve closed
11/17/2010	9:34:06 AM	H2 valve closed
11/17/2010	9:34:06 AM	BCl3 valve closed
11/17/2010	9:34:06 AM	PH3 valve closed
11/17/2010	9:34:06 AM	SiCl4 pre valve closed
11/17/2010	9:34:06 AM	SiCl4 post valve closed
11/17/2010	9:34:06 AM	Bubbler valve closed
11/17/2010	9:34:06 AM	Main Vac valve opened
11/17/2010	9:34:06 AM	Bypass valve opened
11/17/2010	9:34:06 AM	Helium MFC set to  0.000000
11/17/2010	9:34:06 AM	H2 MFC set to  0.000000
11/17/2010	9:34:06 AM	BCl3 MFC set to  0.000000
11/17/2010	9:34:06 AM	PHl3 MFC set to  0.000000
11/17/2010	9:34:06 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:34:06 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:34:06 AM	Tube furnace set to 0
11/17/2010	9:35:06 AM	H2 valve closed
11/17/2010	9:35:06 AM	BCl3 valve closed
11/17/2010	9:35:06 AM	PH3 valve closed
11/17/2010	9:35:06 AM	SiCl4 pre valve closed
11/17/2010	9:35:06 AM	SiCl4 post valve closed
11/17/2010	9:35:06 AM	Bubbler valve closed
11/17/2010	9:35:06 AM	Helium valve opened
11/17/2010	9:35:06 AM	Main Vac valve opened
11/17/2010	9:35:06 AM	Bypass valve opened
11/17/2010	9:35:06 AM	Helium MFC set to  100.000000
11/17/2010	9:35:06 AM	H2 MFC set to  0.000000
11/17/2010	9:35:06 AM	BCl3 MFC set to  0.000000
11/17/2010	9:35:06 AM	PHl3 MFC set to  0.000000
11/17/2010	9:35:06 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:35:06 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:35:06 AM	Tube furnace set to 0
11/17/2010	9:36:06 AM	Helium valve closed
11/17/2010	9:36:06 AM	H2 valve closed
11/17/2010	9:36:06 AM	BCl3 valve closed
11/17/2010	9:36:06 AM	PH3 valve closed
11/17/2010	9:36:06 AM	SiCl4 pre valve closed
11/17/2010	9:36:06 AM	SiCl4 post valve closed
11/17/2010	9:36:06 AM	Bubbler valve closed
11/17/2010	9:36:06 AM	Main Vac valve opened
11/17/2010	9:36:06 AM	Bypass valve opened
11/17/2010	9:36:06 AM	Helium MFC set to  0.000000
11/17/2010	9:36:06 AM	H2 MFC set to  0.000000
11/17/2010	9:36:06 AM	BCl3 MFC set to  0.000000
11/17/2010	9:36:06 AM	PHl3 MFC set to  0.000000
11/17/2010	9:36:06 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:36:06 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:36:06 AM	Tube furnace set to 0
11/17/2010	9:37:06 AM	H2 valve closed
11/17/2010	9:37:06 AM	BCl3 valve closed
11/17/2010	9:37:06 AM	PH3 valve closed
11/17/2010	9:37:06 AM	SiCl4 pre valve closed
11/17/2010	9:37:06 AM	SiCl4 post valve closed
11/17/2010	9:37:06 AM	Bubbler valve closed
11/17/2010	9:37:06 AM	Helium valve opened
11/17/2010	9:37:06 AM	Main Vac valve opened
11/17/2010	9:37:06 AM	Bypass valve opened
11/17/2010	9:37:06 AM	Helium MFC set to  100.000000
11/17/2010	9:37:06 AM	H2 MFC set to  0.000000
11/17/2010	9:37:06 AM	BCl3 MFC set to  0.000000
11/17/2010	9:37:06 AM	PHl3 MFC set to  0.000000
11/17/2010	9:37:06 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:37:06 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:37:06 AM	Tube furnace set to 0
11/17/2010	9:38:06 AM	Helium valve closed
11/17/2010	9:38:06 AM	H2 valve closed
11/17/2010	9:38:06 AM	BCl3 valve closed
11/17/2010	9:38:06 AM	PH3 valve closed
11/17/2010	9:38:06 AM	SiCl4 pre valve closed
11/17/2010	9:38:06 AM	SiCl4 post valve closed
11/17/2010	9:38:06 AM	Bubbler valve closed
11/17/2010	9:38:06 AM	Main Vac valve opened
11/17/2010	9:38:06 AM	Bypass valve opened
11/17/2010	9:38:06 AM	Helium MFC set to  0.000000
11/17/2010	9:38:06 AM	H2 MFC set to  0.000000
11/17/2010	9:38:06 AM	BCl3 MFC set to  0.000000
11/17/2010	9:38:06 AM	PHl3 MFC set to  0.000000
11/17/2010	9:38:06 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:38:06 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:38:06 AM	Tube furnace set to 0
11/17/2010	9:39:06 AM	H2 valve closed
11/17/2010	9:39:06 AM	BCl3 valve closed
11/17/2010	9:39:06 AM	PH3 valve closed
11/17/2010	9:39:06 AM	SiCl4 pre valve closed
11/17/2010	9:39:06 AM	SiCl4 post valve closed
11/17/2010	9:39:06 AM	Bubbler valve closed
11/17/2010	9:39:06 AM	Helium valve opened
11/17/2010	9:39:06 AM	Main Vac valve opened
11/17/2010	9:39:06 AM	Bypass valve opened
11/17/2010	9:39:07 AM	Helium MFC set to  100.000000
11/17/2010	9:39:07 AM	H2 MFC set to  0.000000
11/17/2010	9:39:07 AM	BCl3 MFC set to  0.000000
11/17/2010	9:39:07 AM	PHl3 MFC set to  0.000000
11/17/2010	9:39:07 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:39:07 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:39:07 AM	Tube furnace set to 0
11/17/2010	9:40:07 AM	Helium valve closed
11/17/2010	9:40:07 AM	H2 valve closed
11/17/2010	9:40:07 AM	BCl3 valve closed
11/17/2010	9:40:07 AM	PH3 valve closed
11/17/2010	9:40:07 AM	SiCl4 pre valve closed
11/17/2010	9:40:07 AM	SiCl4 post valve closed
11/17/2010	9:40:07 AM	Bubbler valve closed
11/17/2010	9:40:07 AM	Main Vac valve opened
11/17/2010	9:40:07 AM	Bypass valve opened
11/17/2010	9:40:07 AM	Helium MFC set to  0.000000
11/17/2010	9:40:07 AM	H2 MFC set to  0.000000
11/17/2010	9:40:07 AM	BCl3 MFC set to  0.000000
11/17/2010	9:40:07 AM	PHl3 MFC set to  0.000000
11/17/2010	9:40:07 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:40:07 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:40:07 AM	Tube furnace set to 0
11/17/2010	9:41:07 AM	H2 valve closed
11/17/2010	9:41:07 AM	BCl3 valve closed
11/17/2010	9:41:07 AM	PH3 valve closed
11/17/2010	9:41:07 AM	SiCl4 pre valve closed
11/17/2010	9:41:07 AM	SiCl4 post valve closed
11/17/2010	9:41:07 AM	Bubbler valve closed
11/17/2010	9:41:07 AM	Helium valve opened
11/17/2010	9:41:07 AM	Main Vac valve opened
11/17/2010	9:41:07 AM	Bypass valve opened
11/17/2010	9:41:07 AM	Helium MFC set to  100.000000
11/17/2010	9:41:07 AM	H2 MFC set to  0.000000
11/17/2010	9:41:07 AM	BCl3 MFC set to  0.000000
11/17/2010	9:41:07 AM	PHl3 MFC set to  0.000000
11/17/2010	9:41:07 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:41:07 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:41:07 AM	Tube furnace set to 0
11/17/2010	9:42:07 AM	Helium valve closed
11/17/2010	9:42:07 AM	H2 valve closed
11/17/2010	9:42:07 AM	BCl3 valve closed
11/17/2010	9:42:07 AM	PH3 valve closed
11/17/2010	9:42:07 AM	SiCl4 pre valve closed
11/17/2010	9:42:07 AM	SiCl4 post valve closed
11/17/2010	9:42:07 AM	Bubbler valve closed
11/17/2010	9:42:07 AM	Main Vac valve opened
11/17/2010	9:42:07 AM	Bypass valve opened
11/17/2010	9:42:07 AM	Helium MFC set to  0.000000
11/17/2010	9:42:07 AM	H2 MFC set to  0.000000
11/17/2010	9:42:07 AM	BCl3 MFC set to  0.000000
11/17/2010	9:42:07 AM	PHl3 MFC set to  0.000000
11/17/2010	9:42:07 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:42:07 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:42:07 AM	Tube furnace set to 0
11/17/2010	9:43:07 AM	H2 valve closed
11/17/2010	9:43:07 AM	BCl3 valve closed
11/17/2010	9:43:07 AM	PH3 valve closed
11/17/2010	9:43:07 AM	SiCl4 pre valve closed
11/17/2010	9:43:07 AM	SiCl4 post valve closed
11/17/2010	9:43:07 AM	Bubbler valve closed
11/17/2010	9:43:07 AM	Helium valve opened
11/17/2010	9:43:07 AM	Main Vac valve opened
11/17/2010	9:43:07 AM	Bypass valve opened
11/17/2010	9:43:07 AM	Helium MFC set to  100.000000
11/17/2010	9:43:07 AM	H2 MFC set to  0.000000
11/17/2010	9:43:07 AM	BCl3 MFC set to  0.000000
11/17/2010	9:43:07 AM	PHl3 MFC set to  0.000000
11/17/2010	9:43:07 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:43:07 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:43:07 AM	Tube furnace set to 0
11/17/2010	9:44:07 AM	Helium valve closed
11/17/2010	9:44:08 AM	H2 valve closed
11/17/2010	9:44:08 AM	BCl3 valve closed
11/17/2010	9:44:08 AM	PH3 valve closed
11/17/2010	9:44:08 AM	SiCl4 pre valve closed
11/17/2010	9:44:08 AM	SiCl4 post valve closed
11/17/2010	9:44:08 AM	Bubbler valve closed
11/17/2010	9:44:08 AM	Main Vac valve opened
11/17/2010	9:44:08 AM	Bypass valve opened
11/17/2010	9:44:08 AM	Helium MFC set to  0.000000
11/17/2010	9:44:08 AM	H2 MFC set to  0.000000
11/17/2010	9:44:08 AM	BCl3 MFC set to  0.000000
11/17/2010	9:44:08 AM	PHl3 MFC set to  0.000000
11/17/2010	9:44:08 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:44:08 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:44:08 AM	Tube furnace set to 0
11/17/2010	9:44:48 AM	Run aborted at 9:44 AM
11/17/2010	9:44:48 AM	Helium valve closed
11/17/2010	9:44:48 AM	H2 valve closed
11/17/2010	9:44:48 AM	BCl3 valve closed
11/17/2010	9:44:48 AM	PH3 valve closed
11/17/2010	9:44:48 AM	SiCl4 pre valve closed
11/17/2010	9:44:48 AM	SiCl4 post valve closed
11/17/2010	9:44:48 AM	Bypass valve closed
11/17/2010	9:44:48 AM	Main Vac valve closed
11/17/2010	9:44:48 AM	Bubbler valve closed
11/17/2010	9:44:48 AM	Helium MFC set to  0.000000
11/17/2010	9:44:48 AM	H2 MFC set to  0.000000
11/17/2010	9:44:48 AM	BCl3 MFC set to  0.000000
11/17/2010	9:44:48 AM	PHl3 MFC set to  0.000000
11/17/2010	9:44:48 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:44:49 AM	Tube furnace set to 0
11/17/2010	9:44:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	9:45:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	9:45:13 AM	Recipe started at 9:45 AM
11/17/2010	9:45:13 AM	Helium valve closed
11/17/2010	9:45:13 AM	H2 valve closed
11/17/2010	9:45:13 AM	BCl3 valve closed
11/17/2010	9:45:13 AM	PH3 valve closed
11/17/2010	9:45:13 AM	SiCl4 pre valve closed
11/17/2010	9:45:13 AM	SiCl4 post valve closed
11/17/2010	9:45:13 AM	Main Vac valve closed
11/17/2010	9:45:13 AM	Bubbler valve closed
11/17/2010	9:45:13 AM	Bypass valve opened
11/17/2010	9:45:13 AM	Helium MFC set to  0.000000
11/17/2010	9:45:13 AM	H2 MFC set to  0.000000
11/17/2010	9:45:13 AM	BCl3 MFC set to  0.000000
11/17/2010	9:45:13 AM	PHl3 MFC set to  0.000000
11/17/2010	9:45:13 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:45:13 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:45:14 AM	Tube furnace set to 0
11/17/2010	9:45:14 AM	Helium valve closed
11/17/2010	9:45:14 AM	H2 valve closed
11/17/2010	9:45:14 AM	BCl3 valve closed
11/17/2010	9:45:14 AM	PH3 valve closed
11/17/2010	9:45:14 AM	SiCl4 pre valve closed
11/17/2010	9:45:14 AM	SiCl4 post valve closed
11/17/2010	9:45:14 AM	Bubbler valve closed
11/17/2010	9:45:14 AM	Main Vac valve opened
11/17/2010	9:45:14 AM	Bypass valve opened
11/17/2010	9:45:14 AM	Helium MFC set to  0.000000
11/17/2010	9:45:14 AM	H2 MFC set to  0.000000
11/17/2010	9:45:14 AM	BCl3 MFC set to  0.000000
11/17/2010	9:45:14 AM	PHl3 MFC set to  0.000000
11/17/2010	9:45:14 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:45:14 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:45:14 AM	Tube furnace set to 0
11/17/2010	9:46:14 AM	H2 valve closed
11/17/2010	9:46:14 AM	BCl3 valve closed
11/17/2010	9:46:14 AM	PH3 valve closed
11/17/2010	9:46:14 AM	SiCl4 pre valve closed
11/17/2010	9:46:14 AM	SiCl4 post valve closed
11/17/2010	9:46:14 AM	Bubbler valve closed
11/17/2010	9:46:14 AM	Helium valve opened
11/17/2010	9:46:14 AM	Main Vac valve opened
11/17/2010	9:46:14 AM	Bypass valve opened
11/17/2010	9:46:14 AM	Helium MFC set to  100.000000
11/17/2010	9:46:14 AM	H2 MFC set to  0.000000
11/17/2010	9:46:14 AM	BCl3 MFC set to  0.000000
11/17/2010	9:46:14 AM	PHl3 MFC set to  0.000000
11/17/2010	9:46:14 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:46:14 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:46:14 AM	Tube furnace set to 0
11/17/2010	9:47:14 AM	Helium valve closed
11/17/2010	9:47:14 AM	H2 valve closed
11/17/2010	9:47:14 AM	BCl3 valve closed
11/17/2010	9:47:14 AM	PH3 valve closed
11/17/2010	9:47:14 AM	SiCl4 pre valve closed
11/17/2010	9:47:14 AM	SiCl4 post valve closed
11/17/2010	9:47:14 AM	Bubbler valve closed
11/17/2010	9:47:14 AM	Main Vac valve opened
11/17/2010	9:47:14 AM	Bypass valve opened
11/17/2010	9:47:14 AM	Helium MFC set to  0.000000
11/17/2010	9:47:14 AM	H2 MFC set to  0.000000
11/17/2010	9:47:14 AM	BCl3 MFC set to  0.000000
11/17/2010	9:47:14 AM	PHl3 MFC set to  0.000000
11/17/2010	9:47:14 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:47:14 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:47:14 AM	Tube furnace set to 0
11/17/2010	9:48:15 AM	H2 valve closed
11/17/2010	9:48:15 AM	BCl3 valve closed
11/17/2010	9:48:15 AM	PH3 valve closed
11/17/2010	9:48:15 AM	SiCl4 pre valve closed
11/17/2010	9:48:15 AM	SiCl4 post valve closed
11/17/2010	9:48:15 AM	Bubbler valve closed
11/17/2010	9:48:15 AM	Helium valve opened
11/17/2010	9:48:15 AM	Main Vac valve opened
11/17/2010	9:48:15 AM	Bypass valve opened
11/17/2010	9:48:15 AM	Helium MFC set to  100.000000
11/17/2010	9:48:15 AM	H2 MFC set to  0.000000
11/17/2010	9:48:15 AM	BCl3 MFC set to  0.000000
11/17/2010	9:48:15 AM	PHl3 MFC set to  0.000000
11/17/2010	9:48:15 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:48:15 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:48:15 AM	Tube furnace set to 0
11/17/2010	9:49:15 AM	Helium valve closed
11/17/2010	9:49:15 AM	H2 valve closed
11/17/2010	9:49:15 AM	BCl3 valve closed
11/17/2010	9:49:15 AM	PH3 valve closed
11/17/2010	9:49:15 AM	SiCl4 pre valve closed
11/17/2010	9:49:15 AM	SiCl4 post valve closed
11/17/2010	9:49:15 AM	Bubbler valve closed
11/17/2010	9:49:15 AM	Main Vac valve opened
11/17/2010	9:49:15 AM	Bypass valve opened
11/17/2010	9:49:15 AM	Helium MFC set to  0.000000
11/17/2010	9:49:15 AM	H2 MFC set to  0.000000
11/17/2010	9:49:15 AM	BCl3 MFC set to  0.000000
11/17/2010	9:49:15 AM	PHl3 MFC set to  0.000000
11/17/2010	9:49:15 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:49:15 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:49:15 AM	Tube furnace set to 0
11/17/2010	9:50:15 AM	H2 valve closed
11/17/2010	9:50:15 AM	BCl3 valve closed
11/17/2010	9:50:15 AM	PH3 valve closed
11/17/2010	9:50:15 AM	SiCl4 pre valve closed
11/17/2010	9:50:15 AM	SiCl4 post valve closed
11/17/2010	9:50:15 AM	Bubbler valve closed
11/17/2010	9:50:15 AM	Helium valve opened
11/17/2010	9:50:15 AM	Main Vac valve opened
11/17/2010	9:50:15 AM	Bypass valve opened
11/17/2010	9:50:15 AM	Helium MFC set to  100.000000
11/17/2010	9:50:15 AM	H2 MFC set to  0.000000
11/17/2010	9:50:15 AM	BCl3 MFC set to  0.000000
11/17/2010	9:50:15 AM	PHl3 MFC set to  0.000000
11/17/2010	9:50:15 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:50:15 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:50:15 AM	Tube furnace set to 0
11/17/2010	9:51:15 AM	Helium valve closed
11/17/2010	9:51:15 AM	H2 valve closed
11/17/2010	9:51:15 AM	BCl3 valve closed
11/17/2010	9:51:15 AM	PH3 valve closed
11/17/2010	9:51:15 AM	SiCl4 pre valve closed
11/17/2010	9:51:15 AM	SiCl4 post valve closed
11/17/2010	9:51:15 AM	Bubbler valve closed
11/17/2010	9:51:15 AM	Main Vac valve opened
11/17/2010	9:51:15 AM	Bypass valve opened
11/17/2010	9:51:15 AM	Helium MFC set to  0.000000
11/17/2010	9:51:15 AM	H2 MFC set to  0.000000
11/17/2010	9:51:15 AM	BCl3 MFC set to  0.000000
11/17/2010	9:51:15 AM	PHl3 MFC set to  0.000000
11/17/2010	9:51:15 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:51:15 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:51:15 AM	Tube furnace set to 0
11/17/2010	9:52:15 AM	H2 valve closed
11/17/2010	9:52:15 AM	BCl3 valve closed
11/17/2010	9:52:15 AM	PH3 valve closed
11/17/2010	9:52:15 AM	SiCl4 pre valve closed
11/17/2010	9:52:15 AM	SiCl4 post valve closed
11/17/2010	9:52:15 AM	Bubbler valve closed
11/17/2010	9:52:15 AM	Helium valve opened
11/17/2010	9:52:15 AM	Main Vac valve opened
11/17/2010	9:52:15 AM	Bypass valve opened
11/17/2010	9:52:15 AM	Helium MFC set to  100.000000
11/17/2010	9:52:15 AM	H2 MFC set to  0.000000
11/17/2010	9:52:15 AM	BCl3 MFC set to  0.000000
11/17/2010	9:52:15 AM	PHl3 MFC set to  0.000000
11/17/2010	9:52:15 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:52:15 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:52:15 AM	Tube furnace set to 0
11/17/2010	9:53:15 AM	Helium valve closed
11/17/2010	9:53:15 AM	H2 valve closed
11/17/2010	9:53:15 AM	BCl3 valve closed
11/17/2010	9:53:15 AM	PH3 valve closed
11/17/2010	9:53:15 AM	SiCl4 pre valve closed
11/17/2010	9:53:15 AM	SiCl4 post valve closed
11/17/2010	9:53:15 AM	Bubbler valve closed
11/17/2010	9:53:15 AM	Main Vac valve opened
11/17/2010	9:53:15 AM	Bypass valve opened
11/17/2010	9:53:15 AM	Helium MFC set to  0.000000
11/17/2010	9:53:16 AM	H2 MFC set to  0.000000
11/17/2010	9:53:16 AM	BCl3 MFC set to  0.000000
11/17/2010	9:53:16 AM	PHl3 MFC set to  0.000000
11/17/2010	9:53:16 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:53:16 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:53:16 AM	Tube furnace set to 0
11/17/2010	9:54:16 AM	H2 valve closed
11/17/2010	9:54:16 AM	BCl3 valve closed
11/17/2010	9:54:16 AM	PH3 valve closed
11/17/2010	9:54:16 AM	SiCl4 pre valve closed
11/17/2010	9:54:16 AM	SiCl4 post valve closed
11/17/2010	9:54:16 AM	Bubbler valve closed
11/17/2010	9:54:16 AM	Helium valve opened
11/17/2010	9:54:16 AM	Main Vac valve opened
11/17/2010	9:54:16 AM	Bypass valve opened
11/17/2010	9:54:16 AM	Helium MFC set to  100.000000
11/17/2010	9:54:16 AM	H2 MFC set to  0.000000
11/17/2010	9:54:16 AM	BCl3 MFC set to  0.000000
11/17/2010	9:54:16 AM	PHl3 MFC set to  0.000000
11/17/2010	9:54:16 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:54:16 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:54:16 AM	Tube furnace set to 0
11/17/2010	9:55:16 AM	Helium valve closed
11/17/2010	9:55:16 AM	H2 valve closed
11/17/2010	9:55:16 AM	BCl3 valve closed
11/17/2010	9:55:16 AM	PH3 valve closed
11/17/2010	9:55:16 AM	SiCl4 pre valve closed
11/17/2010	9:55:16 AM	SiCl4 post valve closed
11/17/2010	9:55:16 AM	Bubbler valve closed
11/17/2010	9:55:16 AM	Main Vac valve opened
11/17/2010	9:55:16 AM	Bypass valve opened
11/17/2010	9:55:16 AM	Helium MFC set to  0.000000
11/17/2010	9:55:16 AM	H2 MFC set to  0.000000
11/17/2010	9:55:16 AM	BCl3 MFC set to  0.000000
11/17/2010	9:55:16 AM	PHl3 MFC set to  0.000000
11/17/2010	9:55:16 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:55:16 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:55:16 AM	Tube furnace set to 0
11/17/2010	9:56:16 AM	H2 valve closed
11/17/2010	9:56:16 AM	BCl3 valve closed
11/17/2010	9:56:16 AM	PH3 valve closed
11/17/2010	9:56:16 AM	SiCl4 pre valve closed
11/17/2010	9:56:16 AM	SiCl4 post valve closed
11/17/2010	9:56:16 AM	Bubbler valve closed
11/17/2010	9:56:16 AM	Helium valve opened
11/17/2010	9:56:16 AM	Main Vac valve opened
11/17/2010	9:56:16 AM	Bypass valve opened
11/17/2010	9:56:16 AM	Helium MFC set to  100.000000
11/17/2010	9:56:16 AM	H2 MFC set to  0.000000
11/17/2010	9:56:16 AM	BCl3 MFC set to  0.000000
11/17/2010	9:56:16 AM	PHl3 MFC set to  0.000000
11/17/2010	9:56:16 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:56:16 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:56:16 AM	Tube furnace set to 0
11/17/2010	9:57:16 AM	Helium valve closed
11/17/2010	9:57:16 AM	H2 valve closed
11/17/2010	9:57:16 AM	BCl3 valve closed
11/17/2010	9:57:16 AM	PH3 valve closed
11/17/2010	9:57:16 AM	SiCl4 pre valve closed
11/17/2010	9:57:16 AM	SiCl4 post valve closed
11/17/2010	9:57:16 AM	Bubbler valve closed
11/17/2010	9:57:16 AM	Main Vac valve opened
11/17/2010	9:57:16 AM	Bypass valve opened
11/17/2010	9:57:16 AM	Helium MFC set to  0.000000
11/17/2010	9:57:16 AM	H2 MFC set to  0.000000
11/17/2010	9:57:16 AM	BCl3 MFC set to  0.000000
11/17/2010	9:57:16 AM	PHl3 MFC set to  0.000000
11/17/2010	9:57:16 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:57:16 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:57:16 AM	Tube furnace set to 0
11/17/2010	9:58:16 AM	H2 valve closed
11/17/2010	9:58:16 AM	BCl3 valve closed
11/17/2010	9:58:16 AM	PH3 valve closed
11/17/2010	9:58:16 AM	SiCl4 pre valve closed
11/17/2010	9:58:16 AM	SiCl4 post valve closed
11/17/2010	9:58:16 AM	Bubbler valve closed
11/17/2010	9:58:16 AM	Helium valve opened
11/17/2010	9:58:16 AM	Main Vac valve opened
11/17/2010	9:58:16 AM	Bypass valve opened
11/17/2010	9:58:16 AM	Helium MFC set to  100.000000
11/17/2010	9:58:16 AM	H2 MFC set to  0.000000
11/17/2010	9:58:16 AM	BCl3 MFC set to  0.000000
11/17/2010	9:58:16 AM	PHl3 MFC set to  0.000000
11/17/2010	9:58:16 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:58:16 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:58:17 AM	Tube furnace set to 0
11/17/2010	9:59:17 AM	Helium valve closed
11/17/2010	9:59:17 AM	H2 valve closed
11/17/2010	9:59:17 AM	BCl3 valve closed
11/17/2010	9:59:17 AM	PH3 valve closed
11/17/2010	9:59:17 AM	SiCl4 pre valve closed
11/17/2010	9:59:17 AM	SiCl4 post valve closed
11/17/2010	9:59:17 AM	Bubbler valve closed
11/17/2010	9:59:17 AM	Main Vac valve opened
11/17/2010	9:59:17 AM	Bypass valve opened
11/17/2010	9:59:17 AM	Helium MFC set to  0.000000
11/17/2010	9:59:17 AM	H2 MFC set to  0.000000
11/17/2010	9:59:17 AM	BCl3 MFC set to  0.000000
11/17/2010	9:59:17 AM	PHl3 MFC set to  0.000000
11/17/2010	9:59:17 AM	SiCl4 MFC set to  0.000000
11/17/2010	9:59:17 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	9:59:17 AM	Tube furnace set to 0
11/17/2010	10:00:17 AM	H2 valve closed
11/17/2010	10:00:17 AM	BCl3 valve closed
11/17/2010	10:00:17 AM	PH3 valve closed
11/17/2010	10:00:17 AM	SiCl4 pre valve closed
11/17/2010	10:00:17 AM	SiCl4 post valve closed
11/17/2010	10:00:17 AM	Bubbler valve closed
11/17/2010	10:00:17 AM	Helium valve opened
11/17/2010	10:00:17 AM	Main Vac valve opened
11/17/2010	10:00:17 AM	Bypass valve opened
11/17/2010	10:00:17 AM	Helium MFC set to  100.000000
11/17/2010	10:00:17 AM	H2 MFC set to  0.000000
11/17/2010	10:00:17 AM	BCl3 MFC set to  0.000000
11/17/2010	10:00:17 AM	PHl3 MFC set to  0.000000
11/17/2010	10:00:17 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:00:17 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:00:17 AM	Tube furnace set to 0
11/17/2010	10:01:17 AM	Helium valve closed
11/17/2010	10:01:17 AM	H2 valve closed
11/17/2010	10:01:17 AM	BCl3 valve closed
11/17/2010	10:01:17 AM	PH3 valve closed
11/17/2010	10:01:17 AM	SiCl4 pre valve closed
11/17/2010	10:01:17 AM	SiCl4 post valve closed
11/17/2010	10:01:17 AM	Bubbler valve closed
11/17/2010	10:01:17 AM	Main Vac valve opened
11/17/2010	10:01:17 AM	Bypass valve opened
11/17/2010	10:01:17 AM	Helium MFC set to  0.000000
11/17/2010	10:01:17 AM	H2 MFC set to  0.000000
11/17/2010	10:01:17 AM	BCl3 MFC set to  0.000000
11/17/2010	10:01:17 AM	PHl3 MFC set to  0.000000
11/17/2010	10:01:17 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:01:17 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:01:17 AM	Tube furnace set to 0
11/17/2010	10:02:04 AM	Run aborted at 10:02 AM
11/17/2010	10:02:04 AM	Helium valve closed
11/17/2010	10:02:04 AM	H2 valve closed
11/17/2010	10:02:04 AM	BCl3 valve closed
11/17/2010	10:02:04 AM	PH3 valve closed
11/17/2010	10:02:04 AM	SiCl4 pre valve closed
11/17/2010	10:02:04 AM	SiCl4 post valve closed
11/17/2010	10:02:04 AM	Bypass valve closed
11/17/2010	10:02:04 AM	Main Vac valve closed
11/17/2010	10:02:04 AM	Bubbler valve closed
11/17/2010	10:02:04 AM	Helium MFC set to  0.000000
11/17/2010	10:02:04 AM	H2 MFC set to  0.000000
11/17/2010	10:02:04 AM	BCl3 MFC set to  0.000000
11/17/2010	10:02:04 AM	PHl3 MFC set to  0.000000
11/17/2010	10:02:04 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:02:04 AM	Tube furnace set to 0
11/17/2010	10:02:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	10:02:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	10:02:26 AM	Recipe started at 10:02 AM
11/17/2010	10:02:26 AM	Helium valve closed
11/17/2010	10:02:26 AM	H2 valve closed
11/17/2010	10:02:26 AM	BCl3 valve closed
11/17/2010	10:02:26 AM	PH3 valve closed
11/17/2010	10:02:26 AM	SiCl4 pre valve closed
11/17/2010	10:02:26 AM	SiCl4 post valve closed
11/17/2010	10:02:26 AM	Main Vac valve closed
11/17/2010	10:02:26 AM	Bubbler valve closed
11/17/2010	10:02:26 AM	Bypass valve opened
11/17/2010	10:02:26 AM	Helium MFC set to  0.000000
11/17/2010	10:02:26 AM	H2 MFC set to  0.000000
11/17/2010	10:02:26 AM	BCl3 MFC set to  0.000000
11/17/2010	10:02:26 AM	PHl3 MFC set to  0.000000
11/17/2010	10:02:26 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:02:26 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:02:26 AM	Tube furnace set to 0
11/17/2010	10:02:26 AM	Helium valve closed
11/17/2010	10:02:26 AM	H2 valve closed
11/17/2010	10:02:26 AM	BCl3 valve closed
11/17/2010	10:02:26 AM	PH3 valve closed
11/17/2010	10:02:26 AM	SiCl4 pre valve closed
11/17/2010	10:02:26 AM	SiCl4 post valve closed
11/17/2010	10:02:26 AM	Bubbler valve closed
11/17/2010	10:02:26 AM	Main Vac valve opened
11/17/2010	10:02:26 AM	Bypass valve opened
11/17/2010	10:02:26 AM	Helium MFC set to  0.000000
11/17/2010	10:02:26 AM	H2 MFC set to  0.000000
11/17/2010	10:02:26 AM	BCl3 MFC set to  0.000000
11/17/2010	10:02:26 AM	PHl3 MFC set to  0.000000
11/17/2010	10:02:26 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:02:26 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:02:26 AM	Tube furnace set to 0
11/17/2010	10:03:26 AM	H2 valve closed
11/17/2010	10:03:26 AM	BCl3 valve closed
11/17/2010	10:03:26 AM	PH3 valve closed
11/17/2010	10:03:26 AM	SiCl4 pre valve closed
11/17/2010	10:03:26 AM	SiCl4 post valve closed
11/17/2010	10:03:26 AM	Bubbler valve closed
11/17/2010	10:03:26 AM	Helium valve opened
11/17/2010	10:03:26 AM	Main Vac valve opened
11/17/2010	10:03:26 AM	Bypass valve opened
11/17/2010	10:03:26 AM	Helium MFC set to  100.000000
11/17/2010	10:03:26 AM	H2 MFC set to  0.000000
11/17/2010	10:03:26 AM	BCl3 MFC set to  0.000000
11/17/2010	10:03:26 AM	PHl3 MFC set to  0.000000
11/17/2010	10:03:26 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:03:26 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:03:26 AM	Tube furnace set to 0
11/17/2010	10:04:26 AM	Helium valve closed
11/17/2010	10:04:26 AM	H2 valve closed
11/17/2010	10:04:26 AM	BCl3 valve closed
11/17/2010	10:04:26 AM	PH3 valve closed
11/17/2010	10:04:26 AM	SiCl4 pre valve closed
11/17/2010	10:04:26 AM	SiCl4 post valve closed
11/17/2010	10:04:26 AM	Bubbler valve closed
11/17/2010	10:04:26 AM	Main Vac valve opened
11/17/2010	10:04:26 AM	Bypass valve opened
11/17/2010	10:04:26 AM	Helium MFC set to  0.000000
11/17/2010	10:04:26 AM	H2 MFC set to  0.000000
11/17/2010	10:04:26 AM	BCl3 MFC set to  0.000000
11/17/2010	10:04:26 AM	PHl3 MFC set to  0.000000
11/17/2010	10:04:26 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:04:26 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:04:27 AM	Tube furnace set to 0
11/17/2010	10:05:27 AM	H2 valve closed
11/17/2010	10:05:27 AM	BCl3 valve closed
11/17/2010	10:05:27 AM	PH3 valve closed
11/17/2010	10:05:27 AM	SiCl4 pre valve closed
11/17/2010	10:05:27 AM	SiCl4 post valve closed
11/17/2010	10:05:27 AM	Bubbler valve closed
11/17/2010	10:05:27 AM	Helium valve opened
11/17/2010	10:05:27 AM	Main Vac valve opened
11/17/2010	10:05:27 AM	Bypass valve opened
11/17/2010	10:05:27 AM	Helium MFC set to  100.000000
11/17/2010	10:05:27 AM	H2 MFC set to  0.000000
11/17/2010	10:05:27 AM	BCl3 MFC set to  0.000000
11/17/2010	10:05:27 AM	PHl3 MFC set to  0.000000
11/17/2010	10:05:27 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:05:27 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:05:27 AM	Tube furnace set to 0
11/17/2010	10:06:27 AM	Helium valve closed
11/17/2010	10:06:27 AM	H2 valve closed
11/17/2010	10:06:27 AM	BCl3 valve closed
11/17/2010	10:06:27 AM	PH3 valve closed
11/17/2010	10:06:27 AM	SiCl4 pre valve closed
11/17/2010	10:06:27 AM	SiCl4 post valve closed
11/17/2010	10:06:27 AM	Bubbler valve closed
11/17/2010	10:06:27 AM	Main Vac valve opened
11/17/2010	10:06:27 AM	Bypass valve opened
11/17/2010	10:06:27 AM	Helium MFC set to  0.000000
11/17/2010	10:06:27 AM	H2 MFC set to  0.000000
11/17/2010	10:06:27 AM	BCl3 MFC set to  0.000000
11/17/2010	10:06:27 AM	PHl3 MFC set to  0.000000
11/17/2010	10:06:27 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:06:27 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:06:27 AM	Tube furnace set to 0
11/17/2010	10:07:27 AM	H2 valve closed
11/17/2010	10:07:27 AM	BCl3 valve closed
11/17/2010	10:07:27 AM	PH3 valve closed
11/17/2010	10:07:27 AM	SiCl4 pre valve closed
11/17/2010	10:07:27 AM	SiCl4 post valve closed
11/17/2010	10:07:27 AM	Bubbler valve closed
11/17/2010	10:07:27 AM	Helium valve opened
11/17/2010	10:07:27 AM	Main Vac valve opened
11/17/2010	10:07:27 AM	Bypass valve opened
11/17/2010	10:07:27 AM	Helium MFC set to  100.000000
11/17/2010	10:07:27 AM	H2 MFC set to  0.000000
11/17/2010	10:07:27 AM	BCl3 MFC set to  0.000000
11/17/2010	10:07:27 AM	PHl3 MFC set to  0.000000
11/17/2010	10:07:27 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:07:27 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:07:27 AM	Tube furnace set to 0
11/17/2010	10:08:27 AM	Helium valve closed
11/17/2010	10:08:27 AM	H2 valve closed
11/17/2010	10:08:27 AM	BCl3 valve closed
11/17/2010	10:08:27 AM	PH3 valve closed
11/17/2010	10:08:27 AM	SiCl4 pre valve closed
11/17/2010	10:08:27 AM	SiCl4 post valve closed
11/17/2010	10:08:27 AM	Bubbler valve closed
11/17/2010	10:08:27 AM	Main Vac valve opened
11/17/2010	10:08:27 AM	Bypass valve opened
11/17/2010	10:08:27 AM	Helium MFC set to  0.000000
11/17/2010	10:08:27 AM	H2 MFC set to  0.000000
11/17/2010	10:08:27 AM	BCl3 MFC set to  0.000000
11/17/2010	10:08:27 AM	PHl3 MFC set to  0.000000
11/17/2010	10:08:27 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:08:27 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:08:27 AM	Tube furnace set to 0
11/17/2010	10:09:27 AM	H2 valve closed
11/17/2010	10:09:27 AM	BCl3 valve closed
11/17/2010	10:09:27 AM	PH3 valve closed
11/17/2010	10:09:27 AM	SiCl4 pre valve closed
11/17/2010	10:09:27 AM	SiCl4 post valve closed
11/17/2010	10:09:27 AM	Bubbler valve closed
11/17/2010	10:09:27 AM	Helium valve opened
11/17/2010	10:09:27 AM	Main Vac valve opened
11/17/2010	10:09:27 AM	Bypass valve opened
11/17/2010	10:09:27 AM	Helium MFC set to  100.000000
11/17/2010	10:09:27 AM	H2 MFC set to  0.000000
11/17/2010	10:09:27 AM	BCl3 MFC set to  0.000000
11/17/2010	10:09:27 AM	PHl3 MFC set to  0.000000
11/17/2010	10:09:27 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:09:27 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:09:28 AM	Tube furnace set to 0
11/17/2010	10:10:28 AM	Helium valve closed
11/17/2010	10:10:28 AM	H2 valve closed
11/17/2010	10:10:28 AM	BCl3 valve closed
11/17/2010	10:10:28 AM	PH3 valve closed
11/17/2010	10:10:28 AM	SiCl4 pre valve closed
11/17/2010	10:10:28 AM	SiCl4 post valve closed
11/17/2010	10:10:28 AM	Bubbler valve closed
11/17/2010	10:10:28 AM	Main Vac valve opened
11/17/2010	10:10:28 AM	Bypass valve opened
11/17/2010	10:10:28 AM	Helium MFC set to  0.000000
11/17/2010	10:10:28 AM	H2 MFC set to  0.000000
11/17/2010	10:10:28 AM	BCl3 MFC set to  0.000000
11/17/2010	10:10:28 AM	PHl3 MFC set to  0.000000
11/17/2010	10:10:28 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:10:28 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:10:28 AM	Tube furnace set to 0
11/17/2010	10:11:28 AM	H2 valve closed
11/17/2010	10:11:28 AM	BCl3 valve closed
11/17/2010	10:11:28 AM	PH3 valve closed
11/17/2010	10:11:28 AM	SiCl4 pre valve closed
11/17/2010	10:11:28 AM	SiCl4 post valve closed
11/17/2010	10:11:28 AM	Bubbler valve closed
11/17/2010	10:11:28 AM	Helium valve opened
11/17/2010	10:11:28 AM	Main Vac valve opened
11/17/2010	10:11:28 AM	Bypass valve opened
11/17/2010	10:11:28 AM	Helium MFC set to  100.000000
11/17/2010	10:11:28 AM	H2 MFC set to  0.000000
11/17/2010	10:11:28 AM	BCl3 MFC set to  0.000000
11/17/2010	10:11:28 AM	PHl3 MFC set to  0.000000
11/17/2010	10:11:28 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:11:28 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:11:28 AM	Tube furnace set to 0
11/17/2010	10:12:28 AM	Helium valve closed
11/17/2010	10:12:28 AM	H2 valve closed
11/17/2010	10:12:28 AM	BCl3 valve closed
11/17/2010	10:12:28 AM	PH3 valve closed
11/17/2010	10:12:28 AM	SiCl4 pre valve closed
11/17/2010	10:12:28 AM	SiCl4 post valve closed
11/17/2010	10:12:28 AM	Bubbler valve closed
11/17/2010	10:12:28 AM	Main Vac valve opened
11/17/2010	10:12:28 AM	Bypass valve opened
11/17/2010	10:12:28 AM	Helium MFC set to  0.000000
11/17/2010	10:12:28 AM	H2 MFC set to  0.000000
11/17/2010	10:12:28 AM	BCl3 MFC set to  0.000000
11/17/2010	10:12:28 AM	PHl3 MFC set to  0.000000
11/17/2010	10:12:28 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:12:28 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:12:28 AM	Tube furnace set to 0
11/17/2010	10:13:28 AM	H2 valve closed
11/17/2010	10:13:28 AM	BCl3 valve closed
11/17/2010	10:13:28 AM	PH3 valve closed
11/17/2010	10:13:28 AM	SiCl4 pre valve closed
11/17/2010	10:13:28 AM	SiCl4 post valve closed
11/17/2010	10:13:28 AM	Bubbler valve closed
11/17/2010	10:13:28 AM	Helium valve opened
11/17/2010	10:13:28 AM	Main Vac valve opened
11/17/2010	10:13:28 AM	Bypass valve opened
11/17/2010	10:13:28 AM	Helium MFC set to  100.000000
11/17/2010	10:13:28 AM	H2 MFC set to  0.000000
11/17/2010	10:13:28 AM	BCl3 MFC set to  0.000000
11/17/2010	10:13:28 AM	PHl3 MFC set to  0.000000
11/17/2010	10:13:28 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:13:28 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:13:28 AM	Tube furnace set to 0
11/17/2010	10:14:28 AM	Helium valve closed
11/17/2010	10:14:28 AM	H2 valve closed
11/17/2010	10:14:28 AM	BCl3 valve closed
11/17/2010	10:14:28 AM	PH3 valve closed
11/17/2010	10:14:28 AM	SiCl4 pre valve closed
11/17/2010	10:14:28 AM	SiCl4 post valve closed
11/17/2010	10:14:28 AM	Bubbler valve closed
11/17/2010	10:14:28 AM	Main Vac valve opened
11/17/2010	10:14:28 AM	Bypass valve opened
11/17/2010	10:14:28 AM	Helium MFC set to  0.000000
11/17/2010	10:14:28 AM	H2 MFC set to  0.000000
11/17/2010	10:14:28 AM	BCl3 MFC set to  0.000000
11/17/2010	10:14:28 AM	PHl3 MFC set to  0.000000
11/17/2010	10:14:28 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:14:28 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:14:29 AM	Tube furnace set to 0
11/17/2010	10:15:29 AM	H2 valve closed
11/17/2010	10:15:29 AM	BCl3 valve closed
11/17/2010	10:15:29 AM	PH3 valve closed
11/17/2010	10:15:29 AM	SiCl4 pre valve closed
11/17/2010	10:15:29 AM	SiCl4 post valve closed
11/17/2010	10:15:29 AM	Bubbler valve closed
11/17/2010	10:15:29 AM	Helium valve opened
11/17/2010	10:15:29 AM	Main Vac valve opened
11/17/2010	10:15:29 AM	Bypass valve opened
11/17/2010	10:15:29 AM	Helium MFC set to  100.000000
11/17/2010	10:15:29 AM	H2 MFC set to  0.000000
11/17/2010	10:15:29 AM	BCl3 MFC set to  0.000000
11/17/2010	10:15:29 AM	PHl3 MFC set to  0.000000
11/17/2010	10:15:29 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:15:29 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:15:29 AM	Tube furnace set to 0
11/17/2010	10:16:29 AM	Helium valve closed
11/17/2010	10:16:29 AM	H2 valve closed
11/17/2010	10:16:29 AM	BCl3 valve closed
11/17/2010	10:16:29 AM	PH3 valve closed
11/17/2010	10:16:29 AM	SiCl4 pre valve closed
11/17/2010	10:16:29 AM	SiCl4 post valve closed
11/17/2010	10:16:29 AM	Bubbler valve closed
11/17/2010	10:16:29 AM	Main Vac valve opened
11/17/2010	10:16:29 AM	Bypass valve opened
11/17/2010	10:16:29 AM	Helium MFC set to  0.000000
11/17/2010	10:16:29 AM	H2 MFC set to  0.000000
11/17/2010	10:16:29 AM	BCl3 MFC set to  0.000000
11/17/2010	10:16:29 AM	PHl3 MFC set to  0.000000
11/17/2010	10:16:29 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:16:29 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:16:29 AM	Tube furnace set to 0
11/17/2010	10:17:29 AM	H2 valve closed
11/17/2010	10:17:29 AM	BCl3 valve closed
11/17/2010	10:17:29 AM	PH3 valve closed
11/17/2010	10:17:29 AM	SiCl4 pre valve closed
11/17/2010	10:17:29 AM	SiCl4 post valve closed
11/17/2010	10:17:29 AM	Bubbler valve closed
11/17/2010	10:17:29 AM	Helium valve opened
11/17/2010	10:17:29 AM	Main Vac valve opened
11/17/2010	10:17:29 AM	Bypass valve opened
11/17/2010	10:17:29 AM	Helium MFC set to  100.000000
11/17/2010	10:17:29 AM	H2 MFC set to  0.000000
11/17/2010	10:17:29 AM	BCl3 MFC set to  0.000000
11/17/2010	10:17:29 AM	PHl3 MFC set to  0.000000
11/17/2010	10:17:29 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:17:29 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:17:29 AM	Tube furnace set to 0
11/17/2010	10:17:36 AM	Helium valve closed
11/17/2010	10:17:36 AM	H2 valve closed
11/17/2010	10:17:36 AM	BCl3 valve closed
11/17/2010	10:17:36 AM	PH3 valve closed
11/17/2010	10:17:36 AM	SiCl4 pre valve closed
11/17/2010	10:17:36 AM	SiCl4 post valve closed
11/17/2010	10:17:36 AM	Bubbler valve closed
11/17/2010	10:17:36 AM	Main Vac valve opened
11/17/2010	10:17:36 AM	Bypass valve opened
11/17/2010	10:17:36 AM	Helium MFC set to  0.000000
11/17/2010	10:17:36 AM	H2 MFC set to  0.000000
11/17/2010	10:17:36 AM	BCl3 MFC set to  0.000000
11/17/2010	10:17:36 AM	PHl3 MFC set to  0.000000
11/17/2010	10:17:36 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:17:36 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:17:36 AM	Tube furnace set to 0
11/17/2010	10:18:36 AM	H2 valve closed
11/17/2010	10:18:36 AM	BCl3 valve closed
11/17/2010	10:18:36 AM	PH3 valve closed
11/17/2010	10:18:36 AM	SiCl4 pre valve closed
11/17/2010	10:18:36 AM	SiCl4 post valve closed
11/17/2010	10:18:36 AM	Bubbler valve closed
11/17/2010	10:18:36 AM	Helium valve opened
11/17/2010	10:18:36 AM	Main Vac valve opened
11/17/2010	10:18:36 AM	Bypass valve opened
11/17/2010	10:18:36 AM	Helium MFC set to  100.000000
11/17/2010	10:18:36 AM	H2 MFC set to  0.000000
11/17/2010	10:18:36 AM	BCl3 MFC set to  0.000000
11/17/2010	10:18:36 AM	PHl3 MFC set to  0.000000
11/17/2010	10:18:36 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:18:36 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:18:36 AM	Tube furnace set to 0
11/17/2010	10:19:03 AM	Helium valve closed
11/17/2010	10:19:03 AM	H2 valve closed
11/17/2010	10:19:03 AM	BCl3 valve closed
11/17/2010	10:19:03 AM	PH3 valve closed
11/17/2010	10:19:03 AM	SiCl4 pre valve closed
11/17/2010	10:19:03 AM	SiCl4 post valve closed
11/17/2010	10:19:03 AM	Bubbler valve closed
11/17/2010	10:19:03 AM	Main Vac valve opened
11/17/2010	10:19:03 AM	Bypass valve opened
11/17/2010	10:19:03 AM	Helium MFC set to  0.000000
11/17/2010	10:19:03 AM	H2 MFC set to  0.000000
11/17/2010	10:19:03 AM	BCl3 MFC set to  0.000000
11/17/2010	10:19:03 AM	PHl3 MFC set to  0.000000
11/17/2010	10:19:03 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:19:03 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:19:03 AM	Tube furnace set to 0
11/17/2010	10:19:05 AM	Run aborted at 10:19 AM
11/17/2010	10:19:05 AM	Helium valve closed
11/17/2010	10:19:05 AM	H2 valve closed
11/17/2010	10:19:05 AM	BCl3 valve closed
11/17/2010	10:19:05 AM	PH3 valve closed
11/17/2010	10:19:05 AM	SiCl4 pre valve closed
11/17/2010	10:19:05 AM	SiCl4 post valve closed
11/17/2010	10:19:05 AM	Bypass valve closed
11/17/2010	10:19:05 AM	Main Vac valve closed
11/17/2010	10:19:05 AM	Bubbler valve closed
11/17/2010	10:19:05 AM	Helium MFC set to  0.000000
11/17/2010	10:19:05 AM	H2 MFC set to  0.000000
11/17/2010	10:19:05 AM	BCl3 MFC set to  0.000000
11/17/2010	10:19:05 AM	PHl3 MFC set to  0.000000
11/17/2010	10:19:05 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:19:05 AM	Tube furnace set to 0
11/17/2010	10:19:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	10:19:10 AM	Bypass valve opened
11/17/2010	10:19:14 AM	Main Vac valve opened
11/17/2010	10:22:25 AM	Bypass valve closed
11/17/2010	10:22:25 AM	Main Vac valve closed
11/17/2010	10:22:40 AM	Helium MFC set to  100.000000
11/17/2010	10:22:42 AM	Helium valve opened
11/17/2010	10:22:44 AM	Bypass valve opened
11/17/2010	10:22:47 AM	Main Vac valve opened
11/17/2010	10:23:04 AM	Helium valve closed
11/17/2010	10:23:51 AM	Recipe started at 10:23 AM
11/17/2010	10:23:51 AM	Helium valve closed
11/17/2010	10:23:51 AM	BCl3 valve closed
11/17/2010	10:23:51 AM	PH3 valve closed
11/17/2010	10:23:51 AM	SiCl4 pre valve closed
11/17/2010	10:23:51 AM	SiCl4 post valve closed
11/17/2010	10:23:51 AM	Main Vac valve closed
11/17/2010	10:23:51 AM	Bypass valve closed
11/17/2010	10:23:51 AM	Bubbler valve closed
11/17/2010	10:23:51 AM	H2 valve opened
11/17/2010	10:23:51 AM	Helium MFC set to  0.000000
11/17/2010	10:23:51 AM	H2 MFC set to  500.000000
11/17/2010	10:23:51 AM	BCl3 MFC set to  0.000000
11/17/2010	10:23:51 AM	PHl3 MFC set to  0.000000
11/17/2010	10:23:51 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:23:51 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:23:51 AM	Tube furnace set to 0
11/17/2010	10:25:14 AM	Helium valve closed
11/17/2010	10:25:14 AM	BCl3 valve closed
11/17/2010	10:25:14 AM	PH3 valve closed
11/17/2010	10:25:14 AM	SiCl4 pre valve closed
11/17/2010	10:25:14 AM	SiCl4 post valve closed
11/17/2010	10:25:14 AM	Main Vac valve closed
11/17/2010	10:25:14 AM	Bypass valve closed
11/17/2010	10:25:14 AM	H2 valve opened
11/17/2010	10:25:14 AM	Bubbler valve opened
11/17/2010	10:25:14 AM	Helium MFC set to  0.000000
11/17/2010	10:25:14 AM	H2 MFC set to  500.000000
11/17/2010	10:25:14 AM	BCl3 MFC set to  0.000000
11/17/2010	10:25:14 AM	PHl3 MFC set to  0.000000
11/17/2010	10:25:14 AM	SiCl4 MFC set to  0.000000
11/17/2010	10:25:14 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:25:14 AM	Tube furnace set to 1000
11/17/2010	10:45:14 AM	Helium valve closed
11/17/2010	10:45:14 AM	PH3 valve closed
11/17/2010	10:45:14 AM	Main Vac valve closed
11/17/2010	10:45:14 AM	Bypass valve closed
11/17/2010	10:45:14 AM	H2 valve opened
11/17/2010	10:45:14 AM	BCl3 valve opened
11/17/2010	10:45:14 AM	SiCl4 pre valve opened
11/17/2010	10:45:14 AM	SiCl4 post valve opened
11/17/2010	10:45:14 AM	Bubbler valve opened
11/17/2010	10:45:14 AM	Helium MFC set to  0.000000
11/17/2010	10:45:14 AM	H2 MFC set to  500.000000
11/17/2010	10:45:14 AM	BCl3 MFC set to  12.000000
11/17/2010	10:45:14 AM	PHl3 MFC set to  0.000000
11/17/2010	10:45:14 AM	SiCl4 MFC set to  50.000000
11/17/2010	10:45:14 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	10:45:15 AM	Tube furnace set to 1000
11/17/2010	11:05:15 AM	H2 valve closed
11/17/2010	11:05:15 AM	BCl3 valve closed
11/17/2010	11:05:15 AM	PH3 valve closed
11/17/2010	11:05:15 AM	SiCl4 pre valve closed
11/17/2010	11:05:15 AM	SiCl4 post valve closed
11/17/2010	11:05:15 AM	Main Vac valve closed
11/17/2010	11:05:15 AM	Bypass valve closed
11/17/2010	11:05:15 AM	Helium valve opened
11/17/2010	11:05:15 AM	Bubbler valve opened
11/17/2010	11:05:15 AM	Helium MFC set to  500.000000
11/17/2010	11:05:15 AM	H2 MFC set to  0.000000
11/17/2010	11:05:15 AM	BCl3 MFC set to  0.000000
11/17/2010	11:05:15 AM	PHl3 MFC set to  0.000000
11/17/2010	11:05:15 AM	SiCl4 MFC set to  0.000000
11/17/2010	11:05:15 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	11:05:15 AM	Tube furnace set to 950
11/17/2010	11:10:15 AM	H2 valve closed
11/17/2010	11:10:15 AM	BCl3 valve closed
11/17/2010	11:10:15 AM	PH3 valve closed
11/17/2010	11:10:15 AM	SiCl4 pre valve closed
11/17/2010	11:10:15 AM	SiCl4 post valve closed
11/17/2010	11:10:15 AM	Main Vac valve closed
11/17/2010	11:10:15 AM	Bypass valve closed
11/17/2010	11:10:15 AM	Helium valve opened
11/17/2010	11:10:15 AM	Bubbler valve opened
11/17/2010	11:10:15 AM	Helium MFC set to  500.000000
11/17/2010	11:10:15 AM	H2 MFC set to  0.000000
11/17/2010	11:10:15 AM	BCl3 MFC set to  0.000000
11/17/2010	11:10:15 AM	PHl3 MFC set to  0.000000
11/17/2010	11:10:15 AM	SiCl4 MFC set to  0.000000
11/17/2010	11:10:15 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	11:10:15 AM	Tube furnace set to 900
11/17/2010	11:15:15 AM	H2 valve closed
11/17/2010	11:15:15 AM	BCl3 valve closed
11/17/2010	11:15:15 AM	PH3 valve closed
11/17/2010	11:15:15 AM	SiCl4 pre valve closed
11/17/2010	11:15:15 AM	SiCl4 post valve closed
11/17/2010	11:15:15 AM	Main Vac valve closed
11/17/2010	11:15:15 AM	Bypass valve closed
11/17/2010	11:15:15 AM	Helium valve opened
11/17/2010	11:15:15 AM	Bubbler valve opened
11/17/2010	11:15:15 AM	Helium MFC set to  500.000000
11/17/2010	11:15:15 AM	H2 MFC set to  0.000000
11/17/2010	11:15:15 AM	BCl3 MFC set to  0.000000
11/17/2010	11:15:15 AM	PHl3 MFC set to  0.000000
11/17/2010	11:15:15 AM	SiCl4 MFC set to  0.000000
11/17/2010	11:15:15 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	11:15:15 AM	Tube furnace set to 850
11/17/2010	11:20:15 AM	H2 valve closed
11/17/2010	11:20:15 AM	BCl3 valve closed
11/17/2010	11:20:15 AM	PH3 valve closed
11/17/2010	11:20:15 AM	SiCl4 pre valve closed
11/17/2010	11:20:15 AM	SiCl4 post valve closed
11/17/2010	11:20:15 AM	Main Vac valve closed
11/17/2010	11:20:15 AM	Bypass valve closed
11/17/2010	11:20:15 AM	Helium valve opened
11/17/2010	11:20:15 AM	Bubbler valve opened
11/17/2010	11:20:15 AM	Helium MFC set to  500.000000
11/17/2010	11:20:15 AM	H2 MFC set to  0.000000
11/17/2010	11:20:15 AM	BCl3 MFC set to  0.000000
11/17/2010	11:20:15 AM	PHl3 MFC set to  0.000000
11/17/2010	11:20:15 AM	SiCl4 MFC set to  0.000000
11/17/2010	11:20:15 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	11:20:15 AM	Tube furnace set to 800
11/17/2010	11:25:15 AM	H2 valve closed
11/17/2010	11:25:15 AM	BCl3 valve closed
11/17/2010	11:25:15 AM	PH3 valve closed
11/17/2010	11:25:15 AM	SiCl4 pre valve closed
11/17/2010	11:25:15 AM	SiCl4 post valve closed
11/17/2010	11:25:15 AM	Main Vac valve closed
11/17/2010	11:25:15 AM	Bypass valve closed
11/17/2010	11:25:15 AM	Helium valve opened
11/17/2010	11:25:15 AM	Bubbler valve opened
11/17/2010	11:25:15 AM	Helium MFC set to  500.000000
11/17/2010	11:25:15 AM	H2 MFC set to  0.000000
11/17/2010	11:25:15 AM	BCl3 MFC set to  0.000000
11/17/2010	11:25:15 AM	PHl3 MFC set to  0.000000
11/17/2010	11:25:15 AM	SiCl4 MFC set to  0.000000
11/17/2010	11:25:15 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	11:25:15 AM	Tube furnace set to 750
11/17/2010	11:30:15 AM	H2 valve closed
11/17/2010	11:30:15 AM	BCl3 valve closed
11/17/2010	11:30:15 AM	PH3 valve closed
11/17/2010	11:30:15 AM	SiCl4 pre valve closed
11/17/2010	11:30:15 AM	SiCl4 post valve closed
11/17/2010	11:30:15 AM	Main Vac valve closed
11/17/2010	11:30:15 AM	Bypass valve closed
11/17/2010	11:30:15 AM	Helium valve opened
11/17/2010	11:30:15 AM	Bubbler valve opened
11/17/2010	11:30:15 AM	Helium MFC set to  500.000000
11/17/2010	11:30:15 AM	H2 MFC set to  0.000000
11/17/2010	11:30:15 AM	BCl3 MFC set to  0.000000
11/17/2010	11:30:15 AM	PHl3 MFC set to  0.000000
11/17/2010	11:30:15 AM	SiCl4 MFC set to  0.000000
11/17/2010	11:30:15 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	11:30:16 AM	Tube furnace set to 700
11/17/2010	11:35:16 AM	H2 valve closed
11/17/2010	11:35:16 AM	BCl3 valve closed
11/17/2010	11:35:16 AM	PH3 valve closed
11/17/2010	11:35:16 AM	SiCl4 pre valve closed
11/17/2010	11:35:16 AM	SiCl4 post valve closed
11/17/2010	11:35:16 AM	Main Vac valve closed
11/17/2010	11:35:16 AM	Bypass valve closed
11/17/2010	11:35:16 AM	Helium valve opened
11/17/2010	11:35:16 AM	Bubbler valve opened
11/17/2010	11:35:16 AM	Helium MFC set to  500.000000
11/17/2010	11:35:16 AM	H2 MFC set to  0.000000
11/17/2010	11:35:16 AM	BCl3 MFC set to  0.000000
11/17/2010	11:35:16 AM	PHl3 MFC set to  0.000000
11/17/2010	11:35:16 AM	SiCl4 MFC set to  0.000000
11/17/2010	11:35:16 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	11:35:16 AM	Tube furnace set to 0
11/17/2010	11:55:16 AM	Helium valve closed
11/17/2010	11:55:16 AM	H2 valve closed
11/17/2010	11:55:16 AM	BCl3 valve closed
11/17/2010	11:55:16 AM	PH3 valve closed
11/17/2010	11:55:16 AM	SiCl4 pre valve closed
11/17/2010	11:55:16 AM	SiCl4 post valve closed
11/17/2010	11:55:16 AM	Main Vac valve closed
11/17/2010	11:55:16 AM	Bypass valve closed
11/17/2010	11:55:16 AM	Bubbler valve closed
11/17/2010	11:55:16 AM	Helium MFC set to  0.000000
11/17/2010	11:55:16 AM	H2 MFC set to  0.000000
11/17/2010	11:55:16 AM	BCl3 MFC set to  0.000000
11/17/2010	11:55:16 AM	PHl3 MFC set to  0.000000
11/17/2010	11:55:16 AM	SiCl4 MFC set to  0.000000
11/17/2010	11:55:16 AM	Bypass solenoid MFC set to  0.000000
11/17/2010	11:55:16 AM	Tube furnace set to 0
11/17/2010	11:55:16 AM	Run finished at 11:55 AM
11/17/2010	12:57:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2010	12:57:27 PM	Recipe started at 12:57 PM
11/17/2010	12:57:27 PM	Helium valve closed
11/17/2010	12:57:27 PM	H2 valve closed
11/17/2010	12:57:27 PM	BCl3 valve closed
11/17/2010	12:57:27 PM	PH3 valve closed
11/17/2010	12:57:27 PM	SiCl4 pre valve closed
11/17/2010	12:57:27 PM	SiCl4 post valve closed
11/17/2010	12:57:27 PM	Main Vac valve closed
11/17/2010	12:57:27 PM	Bubbler valve closed
11/17/2010	12:57:27 PM	Bypass valve opened
11/17/2010	12:57:27 PM	Helium MFC set to  0.000000
11/17/2010	12:57:27 PM	H2 MFC set to  0.000000
11/17/2010	12:57:27 PM	BCl3 MFC set to  0.000000
11/17/2010	12:57:27 PM	PHl3 MFC set to  0.000000
11/17/2010	12:57:27 PM	SiCl4 MFC set to  0.000000
11/17/2010	12:57:27 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	12:57:27 PM	Tube furnace set to 0
11/17/2010	12:58:21 PM	Helium valve closed
11/17/2010	12:58:21 PM	H2 valve closed
11/17/2010	12:58:21 PM	BCl3 valve closed
11/17/2010	12:58:21 PM	PH3 valve closed
11/17/2010	12:58:21 PM	SiCl4 pre valve closed
11/17/2010	12:58:21 PM	SiCl4 post valve closed
11/17/2010	12:58:21 PM	Bubbler valve closed
11/17/2010	12:58:21 PM	Main Vac valve opened
11/17/2010	12:58:21 PM	Bypass valve opened
11/17/2010	12:58:21 PM	Helium MFC set to  0.000000
11/17/2010	12:58:21 PM	H2 MFC set to  0.000000
11/17/2010	12:58:21 PM	BCl3 MFC set to  0.000000
11/17/2010	12:58:21 PM	PHl3 MFC set to  0.000000
11/17/2010	12:58:21 PM	SiCl4 MFC set to  0.000000
11/17/2010	12:58:21 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	12:58:21 PM	Tube furnace set to 0
11/17/2010	12:58:22 PM	Run finished at 12:58 PM
11/17/2010	12:58:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2010	12:58:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	12:58:38 PM	Recipe started at 12:58 PM
11/17/2010	12:58:38 PM	Helium valve closed
11/17/2010	12:58:38 PM	H2 valve closed
11/17/2010	12:58:38 PM	BCl3 valve closed
11/17/2010	12:58:38 PM	PH3 valve closed
11/17/2010	12:58:38 PM	SiCl4 pre valve closed
11/17/2010	12:58:38 PM	SiCl4 post valve closed
11/17/2010	12:58:38 PM	Main Vac valve closed
11/17/2010	12:58:38 PM	Bubbler valve closed
11/17/2010	12:58:38 PM	Bypass valve opened
11/17/2010	12:58:38 PM	Helium MFC set to  0.000000
11/17/2010	12:58:38 PM	H2 MFC set to  0.000000
11/17/2010	12:58:38 PM	BCl3 MFC set to  0.000000
11/17/2010	12:58:38 PM	PHl3 MFC set to  0.000000
11/17/2010	12:58:38 PM	SiCl4 MFC set to  0.000000
11/17/2010	12:58:38 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	12:58:38 PM	Tube furnace set to 0
11/17/2010	12:58:38 PM	Helium valve closed
11/17/2010	12:58:38 PM	H2 valve closed
11/17/2010	12:58:38 PM	BCl3 valve closed
11/17/2010	12:58:38 PM	PH3 valve closed
11/17/2010	12:58:38 PM	SiCl4 pre valve closed
11/17/2010	12:58:38 PM	SiCl4 post valve closed
11/17/2010	12:58:38 PM	Bubbler valve closed
11/17/2010	12:58:38 PM	Main Vac valve opened
11/17/2010	12:58:38 PM	Bypass valve opened
11/17/2010	12:58:38 PM	Helium MFC set to  0.000000
11/17/2010	12:58:38 PM	H2 MFC set to  0.000000
11/17/2010	12:58:38 PM	BCl3 MFC set to  0.000000
11/17/2010	12:58:38 PM	PHl3 MFC set to  0.000000
11/17/2010	12:58:38 PM	SiCl4 MFC set to  0.000000
11/17/2010	12:58:38 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	12:58:39 PM	Tube furnace set to 0
11/17/2010	12:59:39 PM	H2 valve closed
11/17/2010	12:59:39 PM	BCl3 valve closed
11/17/2010	12:59:39 PM	PH3 valve closed
11/17/2010	12:59:39 PM	SiCl4 pre valve closed
11/17/2010	12:59:39 PM	SiCl4 post valve closed
11/17/2010	12:59:39 PM	Bubbler valve closed
11/17/2010	12:59:39 PM	Helium valve opened
11/17/2010	12:59:39 PM	Main Vac valve opened
11/17/2010	12:59:39 PM	Bypass valve opened
11/17/2010	12:59:39 PM	Helium MFC set to  100.000000
11/17/2010	12:59:39 PM	H2 MFC set to  0.000000
11/17/2010	12:59:39 PM	BCl3 MFC set to  0.000000
11/17/2010	12:59:39 PM	PHl3 MFC set to  0.000000
11/17/2010	12:59:39 PM	SiCl4 MFC set to  0.000000
11/17/2010	12:59:39 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	12:59:39 PM	Tube furnace set to 0
11/17/2010	1:00:39 PM	Helium valve closed
11/17/2010	1:00:39 PM	H2 valve closed
11/17/2010	1:00:39 PM	BCl3 valve closed
11/17/2010	1:00:39 PM	PH3 valve closed
11/17/2010	1:00:39 PM	SiCl4 pre valve closed
11/17/2010	1:00:39 PM	SiCl4 post valve closed
11/17/2010	1:00:39 PM	Bubbler valve closed
11/17/2010	1:00:39 PM	Main Vac valve opened
11/17/2010	1:00:39 PM	Bypass valve opened
11/17/2010	1:00:39 PM	Helium MFC set to  0.000000
11/17/2010	1:00:39 PM	H2 MFC set to  0.000000
11/17/2010	1:00:39 PM	BCl3 MFC set to  0.000000
11/17/2010	1:00:39 PM	PHl3 MFC set to  0.000000
11/17/2010	1:00:39 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:00:39 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:00:39 PM	Tube furnace set to 0
11/17/2010	1:01:39 PM	H2 valve closed
11/17/2010	1:01:39 PM	BCl3 valve closed
11/17/2010	1:01:39 PM	PH3 valve closed
11/17/2010	1:01:39 PM	SiCl4 pre valve closed
11/17/2010	1:01:39 PM	SiCl4 post valve closed
11/17/2010	1:01:39 PM	Bubbler valve closed
11/17/2010	1:01:39 PM	Helium valve opened
11/17/2010	1:01:39 PM	Main Vac valve opened
11/17/2010	1:01:39 PM	Bypass valve opened
11/17/2010	1:01:39 PM	Helium MFC set to  100.000000
11/17/2010	1:01:39 PM	H2 MFC set to  0.000000
11/17/2010	1:01:39 PM	BCl3 MFC set to  0.000000
11/17/2010	1:01:39 PM	PHl3 MFC set to  0.000000
11/17/2010	1:01:39 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:01:39 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:01:39 PM	Tube furnace set to 0
11/17/2010	1:02:39 PM	Helium valve closed
11/17/2010	1:02:39 PM	H2 valve closed
11/17/2010	1:02:39 PM	BCl3 valve closed
11/17/2010	1:02:39 PM	PH3 valve closed
11/17/2010	1:02:39 PM	SiCl4 pre valve closed
11/17/2010	1:02:39 PM	SiCl4 post valve closed
11/17/2010	1:02:39 PM	Bubbler valve closed
11/17/2010	1:02:39 PM	Main Vac valve opened
11/17/2010	1:02:39 PM	Bypass valve opened
11/17/2010	1:02:39 PM	Helium MFC set to  0.000000
11/17/2010	1:02:39 PM	H2 MFC set to  0.000000
11/17/2010	1:02:39 PM	BCl3 MFC set to  0.000000
11/17/2010	1:02:39 PM	PHl3 MFC set to  0.000000
11/17/2010	1:02:39 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:02:39 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:02:39 PM	Tube furnace set to 0
11/17/2010	1:03:39 PM	H2 valve closed
11/17/2010	1:03:39 PM	BCl3 valve closed
11/17/2010	1:03:39 PM	PH3 valve closed
11/17/2010	1:03:39 PM	SiCl4 pre valve closed
11/17/2010	1:03:39 PM	SiCl4 post valve closed
11/17/2010	1:03:39 PM	Bubbler valve closed
11/17/2010	1:03:39 PM	Helium valve opened
11/17/2010	1:03:39 PM	Main Vac valve opened
11/17/2010	1:03:39 PM	Bypass valve opened
11/17/2010	1:03:39 PM	Helium MFC set to  100.000000
11/17/2010	1:03:39 PM	H2 MFC set to  0.000000
11/17/2010	1:03:39 PM	BCl3 MFC set to  0.000000
11/17/2010	1:03:39 PM	PHl3 MFC set to  0.000000
11/17/2010	1:03:39 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:03:39 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:03:40 PM	Tube furnace set to 0
11/17/2010	1:04:40 PM	Helium valve closed
11/17/2010	1:04:40 PM	H2 valve closed
11/17/2010	1:04:40 PM	BCl3 valve closed
11/17/2010	1:04:40 PM	PH3 valve closed
11/17/2010	1:04:40 PM	SiCl4 pre valve closed
11/17/2010	1:04:40 PM	SiCl4 post valve closed
11/17/2010	1:04:40 PM	Bubbler valve closed
11/17/2010	1:04:40 PM	Main Vac valve opened
11/17/2010	1:04:40 PM	Bypass valve opened
11/17/2010	1:04:40 PM	Helium MFC set to  0.000000
11/17/2010	1:04:40 PM	H2 MFC set to  0.000000
11/17/2010	1:04:40 PM	BCl3 MFC set to  0.000000
11/17/2010	1:04:40 PM	PHl3 MFC set to  0.000000
11/17/2010	1:04:40 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:04:40 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:04:40 PM	Tube furnace set to 0
11/17/2010	1:05:40 PM	H2 valve closed
11/17/2010	1:05:40 PM	BCl3 valve closed
11/17/2010	1:05:40 PM	PH3 valve closed
11/17/2010	1:05:40 PM	SiCl4 pre valve closed
11/17/2010	1:05:40 PM	SiCl4 post valve closed
11/17/2010	1:05:40 PM	Bubbler valve closed
11/17/2010	1:05:40 PM	Helium valve opened
11/17/2010	1:05:40 PM	Main Vac valve opened
11/17/2010	1:05:40 PM	Bypass valve opened
11/17/2010	1:05:40 PM	Helium MFC set to  100.000000
11/17/2010	1:05:40 PM	H2 MFC set to  0.000000
11/17/2010	1:05:40 PM	BCl3 MFC set to  0.000000
11/17/2010	1:05:40 PM	PHl3 MFC set to  0.000000
11/17/2010	1:05:40 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:05:40 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:05:40 PM	Tube furnace set to 0
11/17/2010	1:06:40 PM	Helium valve closed
11/17/2010	1:06:40 PM	H2 valve closed
11/17/2010	1:06:40 PM	BCl3 valve closed
11/17/2010	1:06:40 PM	PH3 valve closed
11/17/2010	1:06:40 PM	SiCl4 pre valve closed
11/17/2010	1:06:40 PM	SiCl4 post valve closed
11/17/2010	1:06:40 PM	Bubbler valve closed
11/17/2010	1:06:40 PM	Main Vac valve opened
11/17/2010	1:06:40 PM	Bypass valve opened
11/17/2010	1:06:40 PM	Helium MFC set to  0.000000
11/17/2010	1:06:40 PM	H2 MFC set to  0.000000
11/17/2010	1:06:40 PM	BCl3 MFC set to  0.000000
11/17/2010	1:06:40 PM	PHl3 MFC set to  0.000000
11/17/2010	1:06:40 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:06:40 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:06:40 PM	Tube furnace set to 0
11/17/2010	1:07:40 PM	H2 valve closed
11/17/2010	1:07:40 PM	BCl3 valve closed
11/17/2010	1:07:40 PM	PH3 valve closed
11/17/2010	1:07:40 PM	SiCl4 pre valve closed
11/17/2010	1:07:40 PM	SiCl4 post valve closed
11/17/2010	1:07:40 PM	Bubbler valve closed
11/17/2010	1:07:40 PM	Helium valve opened
11/17/2010	1:07:40 PM	Main Vac valve opened
11/17/2010	1:07:40 PM	Bypass valve opened
11/17/2010	1:07:40 PM	Helium MFC set to  100.000000
11/17/2010	1:07:40 PM	H2 MFC set to  0.000000
11/17/2010	1:07:40 PM	BCl3 MFC set to  0.000000
11/17/2010	1:07:40 PM	PHl3 MFC set to  0.000000
11/17/2010	1:07:40 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:07:40 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:07:40 PM	Tube furnace set to 0
11/17/2010	1:08:40 PM	Helium valve closed
11/17/2010	1:08:40 PM	H2 valve closed
11/17/2010	1:08:40 PM	BCl3 valve closed
11/17/2010	1:08:40 PM	PH3 valve closed
11/17/2010	1:08:40 PM	SiCl4 pre valve closed
11/17/2010	1:08:40 PM	SiCl4 post valve closed
11/17/2010	1:08:40 PM	Bubbler valve closed
11/17/2010	1:08:40 PM	Main Vac valve opened
11/17/2010	1:08:40 PM	Bypass valve opened
11/17/2010	1:08:40 PM	Helium MFC set to  0.000000
11/17/2010	1:08:40 PM	H2 MFC set to  0.000000
11/17/2010	1:08:40 PM	BCl3 MFC set to  0.000000
11/17/2010	1:08:40 PM	PHl3 MFC set to  0.000000
11/17/2010	1:08:40 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:08:40 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:08:41 PM	Tube furnace set to 0
11/17/2010	1:09:41 PM	H2 valve closed
11/17/2010	1:09:41 PM	BCl3 valve closed
11/17/2010	1:09:41 PM	PH3 valve closed
11/17/2010	1:09:41 PM	SiCl4 pre valve closed
11/17/2010	1:09:41 PM	SiCl4 post valve closed
11/17/2010	1:09:41 PM	Bubbler valve closed
11/17/2010	1:09:41 PM	Helium valve opened
11/17/2010	1:09:41 PM	Main Vac valve opened
11/17/2010	1:09:41 PM	Bypass valve opened
11/17/2010	1:09:41 PM	Helium MFC set to  100.000000
11/17/2010	1:09:41 PM	H2 MFC set to  0.000000
11/17/2010	1:09:41 PM	BCl3 MFC set to  0.000000
11/17/2010	1:09:41 PM	PHl3 MFC set to  0.000000
11/17/2010	1:09:41 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:09:41 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:09:41 PM	Tube furnace set to 0
11/17/2010	1:10:41 PM	Helium valve closed
11/17/2010	1:10:41 PM	H2 valve closed
11/17/2010	1:10:41 PM	BCl3 valve closed
11/17/2010	1:10:41 PM	PH3 valve closed
11/17/2010	1:10:41 PM	SiCl4 pre valve closed
11/17/2010	1:10:41 PM	SiCl4 post valve closed
11/17/2010	1:10:41 PM	Bubbler valve closed
11/17/2010	1:10:41 PM	Main Vac valve opened
11/17/2010	1:10:41 PM	Bypass valve opened
11/17/2010	1:10:41 PM	Helium MFC set to  0.000000
11/17/2010	1:10:41 PM	H2 MFC set to  0.000000
11/17/2010	1:10:41 PM	BCl3 MFC set to  0.000000
11/17/2010	1:10:41 PM	PHl3 MFC set to  0.000000
11/17/2010	1:10:41 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:10:41 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:10:41 PM	Tube furnace set to 0
11/17/2010	1:11:41 PM	H2 valve closed
11/17/2010	1:11:41 PM	BCl3 valve closed
11/17/2010	1:11:41 PM	PH3 valve closed
11/17/2010	1:11:41 PM	SiCl4 pre valve closed
11/17/2010	1:11:41 PM	SiCl4 post valve closed
11/17/2010	1:11:41 PM	Bubbler valve closed
11/17/2010	1:11:41 PM	Helium valve opened
11/17/2010	1:11:41 PM	Main Vac valve opened
11/17/2010	1:11:41 PM	Bypass valve opened
11/17/2010	1:11:41 PM	Helium MFC set to  100.000000
11/17/2010	1:11:41 PM	H2 MFC set to  0.000000
11/17/2010	1:11:41 PM	BCl3 MFC set to  0.000000
11/17/2010	1:11:41 PM	PHl3 MFC set to  0.000000
11/17/2010	1:11:41 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:11:41 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:11:41 PM	Tube furnace set to 0
11/17/2010	1:12:41 PM	Helium valve closed
11/17/2010	1:12:41 PM	H2 valve closed
11/17/2010	1:12:41 PM	BCl3 valve closed
11/17/2010	1:12:41 PM	PH3 valve closed
11/17/2010	1:12:41 PM	SiCl4 pre valve closed
11/17/2010	1:12:41 PM	SiCl4 post valve closed
11/17/2010	1:12:41 PM	Bubbler valve closed
11/17/2010	1:12:41 PM	Main Vac valve opened
11/17/2010	1:12:41 PM	Bypass valve opened
11/17/2010	1:12:41 PM	Helium MFC set to  0.000000
11/17/2010	1:12:41 PM	H2 MFC set to  0.000000
11/17/2010	1:12:41 PM	BCl3 MFC set to  0.000000
11/17/2010	1:12:41 PM	PHl3 MFC set to  0.000000
11/17/2010	1:12:41 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:12:41 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:12:41 PM	Tube furnace set to 0
11/17/2010	1:13:41 PM	H2 valve closed
11/17/2010	1:13:41 PM	BCl3 valve closed
11/17/2010	1:13:41 PM	PH3 valve closed
11/17/2010	1:13:41 PM	SiCl4 pre valve closed
11/17/2010	1:13:41 PM	SiCl4 post valve closed
11/17/2010	1:13:41 PM	Bubbler valve closed
11/17/2010	1:13:41 PM	Helium valve opened
11/17/2010	1:13:41 PM	Main Vac valve opened
11/17/2010	1:13:41 PM	Bypass valve opened
11/17/2010	1:13:41 PM	Helium MFC set to  100.000000
11/17/2010	1:13:41 PM	H2 MFC set to  0.000000
11/17/2010	1:13:41 PM	BCl3 MFC set to  0.000000
11/17/2010	1:13:41 PM	PHl3 MFC set to  0.000000
11/17/2010	1:13:41 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:13:41 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:13:42 PM	Tube furnace set to 0
11/17/2010	1:14:42 PM	Helium valve closed
11/17/2010	1:14:42 PM	H2 valve closed
11/17/2010	1:14:42 PM	BCl3 valve closed
11/17/2010	1:14:42 PM	PH3 valve closed
11/17/2010	1:14:42 PM	SiCl4 pre valve closed
11/17/2010	1:14:42 PM	SiCl4 post valve closed
11/17/2010	1:14:42 PM	Bubbler valve closed
11/17/2010	1:14:42 PM	Main Vac valve opened
11/17/2010	1:14:42 PM	Bypass valve opened
11/17/2010	1:14:42 PM	Helium MFC set to  0.000000
11/17/2010	1:14:42 PM	H2 MFC set to  0.000000
11/17/2010	1:14:42 PM	BCl3 MFC set to  0.000000
11/17/2010	1:14:42 PM	PHl3 MFC set to  0.000000
11/17/2010	1:14:42 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:14:42 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:14:42 PM	Tube furnace set to 0
11/17/2010	1:15:42 PM	H2 valve closed
11/17/2010	1:15:42 PM	BCl3 valve closed
11/17/2010	1:15:42 PM	PH3 valve closed
11/17/2010	1:15:42 PM	SiCl4 pre valve closed
11/17/2010	1:15:42 PM	SiCl4 post valve closed
11/17/2010	1:15:42 PM	Bubbler valve closed
11/17/2010	1:15:42 PM	Helium valve opened
11/17/2010	1:15:42 PM	Main Vac valve opened
11/17/2010	1:15:42 PM	Bypass valve opened
11/17/2010	1:15:42 PM	Helium MFC set to  100.000000
11/17/2010	1:15:42 PM	H2 MFC set to  0.000000
11/17/2010	1:15:42 PM	BCl3 MFC set to  0.000000
11/17/2010	1:15:42 PM	PHl3 MFC set to  0.000000
11/17/2010	1:15:42 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:15:42 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:15:42 PM	Tube furnace set to 0
11/17/2010	1:16:42 PM	Helium valve closed
11/17/2010	1:16:42 PM	H2 valve closed
11/17/2010	1:16:42 PM	BCl3 valve closed
11/17/2010	1:16:42 PM	PH3 valve closed
11/17/2010	1:16:42 PM	SiCl4 pre valve closed
11/17/2010	1:16:42 PM	SiCl4 post valve closed
11/17/2010	1:16:42 PM	Bubbler valve closed
11/17/2010	1:16:42 PM	Main Vac valve opened
11/17/2010	1:16:42 PM	Bypass valve opened
11/17/2010	1:16:42 PM	Helium MFC set to  0.000000
11/17/2010	1:16:42 PM	H2 MFC set to  0.000000
11/17/2010	1:16:42 PM	BCl3 MFC set to  0.000000
11/17/2010	1:16:42 PM	PHl3 MFC set to  0.000000
11/17/2010	1:16:42 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:16:42 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:16:42 PM	Tube furnace set to 0
11/17/2010	1:17:42 PM	H2 valve closed
11/17/2010	1:17:42 PM	BCl3 valve closed
11/17/2010	1:17:42 PM	PH3 valve closed
11/17/2010	1:17:42 PM	SiCl4 pre valve closed
11/17/2010	1:17:42 PM	SiCl4 post valve closed
11/17/2010	1:17:42 PM	Bubbler valve closed
11/17/2010	1:17:42 PM	Helium valve opened
11/17/2010	1:17:42 PM	Main Vac valve opened
11/17/2010	1:17:42 PM	Bypass valve opened
11/17/2010	1:17:42 PM	Helium MFC set to  100.000000
11/17/2010	1:17:42 PM	H2 MFC set to  0.000000
11/17/2010	1:17:42 PM	BCl3 MFC set to  0.000000
11/17/2010	1:17:42 PM	PHl3 MFC set to  0.000000
11/17/2010	1:17:42 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:17:42 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:17:42 PM	Tube furnace set to 0
11/17/2010	1:18:42 PM	Helium valve closed
11/17/2010	1:18:42 PM	H2 valve closed
11/17/2010	1:18:42 PM	BCl3 valve closed
11/17/2010	1:18:42 PM	PH3 valve closed
11/17/2010	1:18:42 PM	SiCl4 pre valve closed
11/17/2010	1:18:42 PM	SiCl4 post valve closed
11/17/2010	1:18:42 PM	Bubbler valve closed
11/17/2010	1:18:42 PM	Main Vac valve opened
11/17/2010	1:18:42 PM	Bypass valve opened
11/17/2010	1:18:42 PM	Helium MFC set to  0.000000
11/17/2010	1:18:42 PM	H2 MFC set to  0.000000
11/17/2010	1:18:42 PM	BCl3 MFC set to  0.000000
11/17/2010	1:18:42 PM	PHl3 MFC set to  0.000000
11/17/2010	1:18:42 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:18:42 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:18:43 PM	Tube furnace set to 0
11/17/2010	1:18:44 PM	Run finished at 1:18 PM
11/17/2010	1:18:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	1:25:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	1:26:01 PM	Recipe started at 1:25 PM
11/17/2010	1:26:01 PM	Helium valve closed
11/17/2010	1:26:01 PM	H2 valve closed
11/17/2010	1:26:01 PM	BCl3 valve closed
11/17/2010	1:26:01 PM	PH3 valve closed
11/17/2010	1:26:01 PM	SiCl4 pre valve closed
11/17/2010	1:26:01 PM	SiCl4 post valve closed
11/17/2010	1:26:01 PM	Main Vac valve closed
11/17/2010	1:26:01 PM	Bubbler valve closed
11/17/2010	1:26:01 PM	Bypass valve opened
11/17/2010	1:26:01 PM	Helium MFC set to  0.000000
11/17/2010	1:26:01 PM	H2 MFC set to  0.000000
11/17/2010	1:26:01 PM	BCl3 MFC set to  0.000000
11/17/2010	1:26:01 PM	PHl3 MFC set to  0.000000
11/17/2010	1:26:01 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:26:01 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:26:01 PM	Tube furnace set to 0
11/17/2010	1:26:01 PM	Helium valve closed
11/17/2010	1:26:01 PM	H2 valve closed
11/17/2010	1:26:01 PM	BCl3 valve closed
11/17/2010	1:26:01 PM	PH3 valve closed
11/17/2010	1:26:01 PM	SiCl4 pre valve closed
11/17/2010	1:26:01 PM	SiCl4 post valve closed
11/17/2010	1:26:01 PM	Bubbler valve closed
11/17/2010	1:26:01 PM	Main Vac valve opened
11/17/2010	1:26:01 PM	Bypass valve opened
11/17/2010	1:26:01 PM	Helium MFC set to  0.000000
11/17/2010	1:26:01 PM	H2 MFC set to  0.000000
11/17/2010	1:26:01 PM	BCl3 MFC set to  0.000000
11/17/2010	1:26:01 PM	PHl3 MFC set to  0.000000
11/17/2010	1:26:01 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:26:01 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:26:01 PM	Tube furnace set to 0
11/17/2010	1:27:01 PM	H2 valve closed
11/17/2010	1:27:01 PM	BCl3 valve closed
11/17/2010	1:27:01 PM	PH3 valve closed
11/17/2010	1:27:01 PM	SiCl4 pre valve closed
11/17/2010	1:27:01 PM	SiCl4 post valve closed
11/17/2010	1:27:01 PM	Bubbler valve closed
11/17/2010	1:27:01 PM	Helium valve opened
11/17/2010	1:27:01 PM	Main Vac valve opened
11/17/2010	1:27:01 PM	Bypass valve opened
11/17/2010	1:27:01 PM	Helium MFC set to  100.000000
11/17/2010	1:27:01 PM	H2 MFC set to  0.000000
11/17/2010	1:27:01 PM	BCl3 MFC set to  0.000000
11/17/2010	1:27:01 PM	PHl3 MFC set to  0.000000
11/17/2010	1:27:01 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:27:01 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:27:02 PM	Tube furnace set to 0
11/17/2010	1:28:02 PM	Helium valve closed
11/17/2010	1:28:02 PM	H2 valve closed
11/17/2010	1:28:02 PM	BCl3 valve closed
11/17/2010	1:28:02 PM	PH3 valve closed
11/17/2010	1:28:02 PM	SiCl4 pre valve closed
11/17/2010	1:28:02 PM	SiCl4 post valve closed
11/17/2010	1:28:02 PM	Bubbler valve closed
11/17/2010	1:28:02 PM	Main Vac valve opened
11/17/2010	1:28:02 PM	Bypass valve opened
11/17/2010	1:28:02 PM	Helium MFC set to  0.000000
11/17/2010	1:28:02 PM	H2 MFC set to  0.000000
11/17/2010	1:28:02 PM	BCl3 MFC set to  0.000000
11/17/2010	1:28:02 PM	PHl3 MFC set to  0.000000
11/17/2010	1:28:02 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:28:02 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:28:02 PM	Tube furnace set to 0
11/17/2010	1:29:02 PM	H2 valve closed
11/17/2010	1:29:02 PM	BCl3 valve closed
11/17/2010	1:29:02 PM	PH3 valve closed
11/17/2010	1:29:02 PM	SiCl4 pre valve closed
11/17/2010	1:29:02 PM	SiCl4 post valve closed
11/17/2010	1:29:02 PM	Bubbler valve closed
11/17/2010	1:29:02 PM	Helium valve opened
11/17/2010	1:29:02 PM	Main Vac valve opened
11/17/2010	1:29:02 PM	Bypass valve opened
11/17/2010	1:29:02 PM	Helium MFC set to  100.000000
11/17/2010	1:29:02 PM	H2 MFC set to  0.000000
11/17/2010	1:29:02 PM	BCl3 MFC set to  0.000000
11/17/2010	1:29:02 PM	PHl3 MFC set to  0.000000
11/17/2010	1:29:02 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:29:02 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:29:02 PM	Tube furnace set to 0
11/17/2010	1:30:02 PM	Helium valve closed
11/17/2010	1:30:02 PM	H2 valve closed
11/17/2010	1:30:02 PM	BCl3 valve closed
11/17/2010	1:30:02 PM	PH3 valve closed
11/17/2010	1:30:02 PM	SiCl4 pre valve closed
11/17/2010	1:30:02 PM	SiCl4 post valve closed
11/17/2010	1:30:02 PM	Bubbler valve closed
11/17/2010	1:30:02 PM	Main Vac valve opened
11/17/2010	1:30:02 PM	Bypass valve opened
11/17/2010	1:30:02 PM	Helium MFC set to  0.000000
11/17/2010	1:30:02 PM	H2 MFC set to  0.000000
11/17/2010	1:30:02 PM	BCl3 MFC set to  0.000000
11/17/2010	1:30:02 PM	PHl3 MFC set to  0.000000
11/17/2010	1:30:02 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:30:02 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:30:02 PM	Tube furnace set to 0
11/17/2010	1:31:02 PM	H2 valve closed
11/17/2010	1:31:02 PM	BCl3 valve closed
11/17/2010	1:31:02 PM	PH3 valve closed
11/17/2010	1:31:02 PM	SiCl4 pre valve closed
11/17/2010	1:31:02 PM	SiCl4 post valve closed
11/17/2010	1:31:02 PM	Bubbler valve closed
11/17/2010	1:31:02 PM	Helium valve opened
11/17/2010	1:31:02 PM	Main Vac valve opened
11/17/2010	1:31:02 PM	Bypass valve opened
11/17/2010	1:31:02 PM	Helium MFC set to  100.000000
11/17/2010	1:31:02 PM	H2 MFC set to  0.000000
11/17/2010	1:31:02 PM	BCl3 MFC set to  0.000000
11/17/2010	1:31:02 PM	PHl3 MFC set to  0.000000
11/17/2010	1:31:02 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:31:02 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:31:02 PM	Tube furnace set to 0
11/17/2010	1:32:02 PM	Helium valve closed
11/17/2010	1:32:02 PM	H2 valve closed
11/17/2010	1:32:02 PM	BCl3 valve closed
11/17/2010	1:32:02 PM	PH3 valve closed
11/17/2010	1:32:02 PM	SiCl4 pre valve closed
11/17/2010	1:32:02 PM	SiCl4 post valve closed
11/17/2010	1:32:02 PM	Bubbler valve closed
11/17/2010	1:32:02 PM	Main Vac valve opened
11/17/2010	1:32:02 PM	Bypass valve opened
11/17/2010	1:32:02 PM	Helium MFC set to  0.000000
11/17/2010	1:32:02 PM	H2 MFC set to  0.000000
11/17/2010	1:32:02 PM	BCl3 MFC set to  0.000000
11/17/2010	1:32:02 PM	PHl3 MFC set to  0.000000
11/17/2010	1:32:02 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:32:02 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:32:03 PM	Tube furnace set to 0
11/17/2010	1:33:03 PM	H2 valve closed
11/17/2010	1:33:03 PM	BCl3 valve closed
11/17/2010	1:33:03 PM	PH3 valve closed
11/17/2010	1:33:03 PM	SiCl4 pre valve closed
11/17/2010	1:33:03 PM	SiCl4 post valve closed
11/17/2010	1:33:03 PM	Bubbler valve closed
11/17/2010	1:33:03 PM	Helium valve opened
11/17/2010	1:33:03 PM	Main Vac valve opened
11/17/2010	1:33:03 PM	Bypass valve opened
11/17/2010	1:33:03 PM	Helium MFC set to  100.000000
11/17/2010	1:33:03 PM	H2 MFC set to  0.000000
11/17/2010	1:33:03 PM	BCl3 MFC set to  0.000000
11/17/2010	1:33:03 PM	PHl3 MFC set to  0.000000
11/17/2010	1:33:03 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:33:03 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:33:03 PM	Tube furnace set to 0
11/17/2010	1:34:03 PM	Helium valve closed
11/17/2010	1:34:03 PM	H2 valve closed
11/17/2010	1:34:03 PM	BCl3 valve closed
11/17/2010	1:34:03 PM	PH3 valve closed
11/17/2010	1:34:03 PM	SiCl4 pre valve closed
11/17/2010	1:34:03 PM	SiCl4 post valve closed
11/17/2010	1:34:03 PM	Bubbler valve closed
11/17/2010	1:34:03 PM	Main Vac valve opened
11/17/2010	1:34:03 PM	Bypass valve opened
11/17/2010	1:34:03 PM	Helium MFC set to  0.000000
11/17/2010	1:34:03 PM	H2 MFC set to  0.000000
11/17/2010	1:34:03 PM	BCl3 MFC set to  0.000000
11/17/2010	1:34:03 PM	PHl3 MFC set to  0.000000
11/17/2010	1:34:03 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:34:03 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:34:03 PM	Tube furnace set to 0
11/17/2010	1:35:03 PM	H2 valve closed
11/17/2010	1:35:03 PM	BCl3 valve closed
11/17/2010	1:35:03 PM	PH3 valve closed
11/17/2010	1:35:03 PM	SiCl4 pre valve closed
11/17/2010	1:35:03 PM	SiCl4 post valve closed
11/17/2010	1:35:03 PM	Bubbler valve closed
11/17/2010	1:35:03 PM	Helium valve opened
11/17/2010	1:35:03 PM	Main Vac valve opened
11/17/2010	1:35:03 PM	Bypass valve opened
11/17/2010	1:35:03 PM	Helium MFC set to  100.000000
11/17/2010	1:35:03 PM	H2 MFC set to  0.000000
11/17/2010	1:35:03 PM	BCl3 MFC set to  0.000000
11/17/2010	1:35:03 PM	PHl3 MFC set to  0.000000
11/17/2010	1:35:03 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:35:03 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:35:03 PM	Tube furnace set to 0
11/17/2010	1:36:03 PM	Helium valve closed
11/17/2010	1:36:03 PM	H2 valve closed
11/17/2010	1:36:03 PM	BCl3 valve closed
11/17/2010	1:36:03 PM	PH3 valve closed
11/17/2010	1:36:03 PM	SiCl4 pre valve closed
11/17/2010	1:36:03 PM	SiCl4 post valve closed
11/17/2010	1:36:03 PM	Bubbler valve closed
11/17/2010	1:36:03 PM	Main Vac valve opened
11/17/2010	1:36:03 PM	Bypass valve opened
11/17/2010	1:36:03 PM	Helium MFC set to  0.000000
11/17/2010	1:36:03 PM	H2 MFC set to  0.000000
11/17/2010	1:36:03 PM	BCl3 MFC set to  0.000000
11/17/2010	1:36:03 PM	PHl3 MFC set to  0.000000
11/17/2010	1:36:03 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:36:03 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:36:03 PM	Tube furnace set to 0
11/17/2010	1:37:03 PM	H2 valve closed
11/17/2010	1:37:03 PM	BCl3 valve closed
11/17/2010	1:37:03 PM	PH3 valve closed
11/17/2010	1:37:03 PM	SiCl4 pre valve closed
11/17/2010	1:37:03 PM	SiCl4 post valve closed
11/17/2010	1:37:03 PM	Bubbler valve closed
11/17/2010	1:37:03 PM	Helium valve opened
11/17/2010	1:37:03 PM	Main Vac valve opened
11/17/2010	1:37:03 PM	Bypass valve opened
11/17/2010	1:37:03 PM	Helium MFC set to  100.000000
11/17/2010	1:37:03 PM	H2 MFC set to  0.000000
11/17/2010	1:37:03 PM	BCl3 MFC set to  0.000000
11/17/2010	1:37:03 PM	PHl3 MFC set to  0.000000
11/17/2010	1:37:03 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:37:03 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:37:04 PM	Tube furnace set to 0
11/17/2010	1:38:04 PM	Helium valve closed
11/17/2010	1:38:04 PM	H2 valve closed
11/17/2010	1:38:04 PM	BCl3 valve closed
11/17/2010	1:38:04 PM	PH3 valve closed
11/17/2010	1:38:04 PM	SiCl4 pre valve closed
11/17/2010	1:38:04 PM	SiCl4 post valve closed
11/17/2010	1:38:04 PM	Bubbler valve closed
11/17/2010	1:38:04 PM	Main Vac valve opened
11/17/2010	1:38:04 PM	Bypass valve opened
11/17/2010	1:38:04 PM	Helium MFC set to  0.000000
11/17/2010	1:38:04 PM	H2 MFC set to  0.000000
11/17/2010	1:38:04 PM	BCl3 MFC set to  0.000000
11/17/2010	1:38:04 PM	PHl3 MFC set to  0.000000
11/17/2010	1:38:04 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:38:04 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:38:04 PM	Tube furnace set to 0
11/17/2010	1:39:04 PM	H2 valve closed
11/17/2010	1:39:04 PM	BCl3 valve closed
11/17/2010	1:39:04 PM	PH3 valve closed
11/17/2010	1:39:04 PM	SiCl4 pre valve closed
11/17/2010	1:39:04 PM	SiCl4 post valve closed
11/17/2010	1:39:04 PM	Bubbler valve closed
11/17/2010	1:39:04 PM	Helium valve opened
11/17/2010	1:39:04 PM	Main Vac valve opened
11/17/2010	1:39:04 PM	Bypass valve opened
11/17/2010	1:39:04 PM	Helium MFC set to  100.000000
11/17/2010	1:39:04 PM	H2 MFC set to  0.000000
11/17/2010	1:39:04 PM	BCl3 MFC set to  0.000000
11/17/2010	1:39:04 PM	PHl3 MFC set to  0.000000
11/17/2010	1:39:04 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:39:04 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:39:04 PM	Tube furnace set to 0
11/17/2010	1:40:04 PM	Helium valve closed
11/17/2010	1:40:04 PM	H2 valve closed
11/17/2010	1:40:04 PM	BCl3 valve closed
11/17/2010	1:40:04 PM	PH3 valve closed
11/17/2010	1:40:04 PM	SiCl4 pre valve closed
11/17/2010	1:40:04 PM	SiCl4 post valve closed
11/17/2010	1:40:04 PM	Bubbler valve closed
11/17/2010	1:40:04 PM	Main Vac valve opened
11/17/2010	1:40:04 PM	Bypass valve opened
11/17/2010	1:40:04 PM	Helium MFC set to  0.000000
11/17/2010	1:40:04 PM	H2 MFC set to  0.000000
11/17/2010	1:40:04 PM	BCl3 MFC set to  0.000000
11/17/2010	1:40:04 PM	PHl3 MFC set to  0.000000
11/17/2010	1:40:04 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:40:04 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:40:04 PM	Tube furnace set to 0
11/17/2010	1:41:04 PM	H2 valve closed
11/17/2010	1:41:04 PM	BCl3 valve closed
11/17/2010	1:41:04 PM	PH3 valve closed
11/17/2010	1:41:04 PM	SiCl4 pre valve closed
11/17/2010	1:41:04 PM	SiCl4 post valve closed
11/17/2010	1:41:04 PM	Bubbler valve closed
11/17/2010	1:41:04 PM	Helium valve opened
11/17/2010	1:41:04 PM	Main Vac valve opened
11/17/2010	1:41:04 PM	Bypass valve opened
11/17/2010	1:41:04 PM	Helium MFC set to  100.000000
11/17/2010	1:41:04 PM	H2 MFC set to  0.000000
11/17/2010	1:41:04 PM	BCl3 MFC set to  0.000000
11/17/2010	1:41:04 PM	PHl3 MFC set to  0.000000
11/17/2010	1:41:04 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:41:04 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:41:04 PM	Tube furnace set to 0
11/17/2010	1:42:04 PM	Helium valve closed
11/17/2010	1:42:04 PM	H2 valve closed
11/17/2010	1:42:04 PM	BCl3 valve closed
11/17/2010	1:42:04 PM	PH3 valve closed
11/17/2010	1:42:04 PM	SiCl4 pre valve closed
11/17/2010	1:42:04 PM	SiCl4 post valve closed
11/17/2010	1:42:04 PM	Bubbler valve closed
11/17/2010	1:42:04 PM	Main Vac valve opened
11/17/2010	1:42:04 PM	Bypass valve opened
11/17/2010	1:42:04 PM	Helium MFC set to  0.000000
11/17/2010	1:42:04 PM	H2 MFC set to  0.000000
11/17/2010	1:42:04 PM	BCl3 MFC set to  0.000000
11/17/2010	1:42:04 PM	PHl3 MFC set to  0.000000
11/17/2010	1:42:04 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:42:04 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:42:05 PM	Tube furnace set to 0
11/17/2010	1:43:05 PM	H2 valve closed
11/17/2010	1:43:05 PM	BCl3 valve closed
11/17/2010	1:43:05 PM	PH3 valve closed
11/17/2010	1:43:05 PM	SiCl4 pre valve closed
11/17/2010	1:43:05 PM	SiCl4 post valve closed
11/17/2010	1:43:05 PM	Bubbler valve closed
11/17/2010	1:43:05 PM	Helium valve opened
11/17/2010	1:43:05 PM	Main Vac valve opened
11/17/2010	1:43:05 PM	Bypass valve opened
11/17/2010	1:43:05 PM	Helium MFC set to  100.000000
11/17/2010	1:43:05 PM	H2 MFC set to  0.000000
11/17/2010	1:43:05 PM	BCl3 MFC set to  0.000000
11/17/2010	1:43:05 PM	PHl3 MFC set to  0.000000
11/17/2010	1:43:05 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:43:05 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:43:05 PM	Tube furnace set to 0
11/17/2010	1:44:05 PM	Helium valve closed
11/17/2010	1:44:05 PM	H2 valve closed
11/17/2010	1:44:05 PM	BCl3 valve closed
11/17/2010	1:44:05 PM	PH3 valve closed
11/17/2010	1:44:05 PM	SiCl4 pre valve closed
11/17/2010	1:44:05 PM	SiCl4 post valve closed
11/17/2010	1:44:05 PM	Bubbler valve closed
11/17/2010	1:44:05 PM	Main Vac valve opened
11/17/2010	1:44:05 PM	Bypass valve opened
11/17/2010	1:44:05 PM	Helium MFC set to  0.000000
11/17/2010	1:44:05 PM	H2 MFC set to  0.000000
11/17/2010	1:44:05 PM	BCl3 MFC set to  0.000000
11/17/2010	1:44:05 PM	PHl3 MFC set to  0.000000
11/17/2010	1:44:05 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:44:05 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:44:05 PM	Tube furnace set to 0
11/17/2010	1:45:05 PM	H2 valve closed
11/17/2010	1:45:05 PM	BCl3 valve closed
11/17/2010	1:45:05 PM	PH3 valve closed
11/17/2010	1:45:05 PM	SiCl4 pre valve closed
11/17/2010	1:45:05 PM	SiCl4 post valve closed
11/17/2010	1:45:05 PM	Bubbler valve closed
11/17/2010	1:45:05 PM	Helium valve opened
11/17/2010	1:45:05 PM	Main Vac valve opened
11/17/2010	1:45:05 PM	Bypass valve opened
11/17/2010	1:45:05 PM	Helium MFC set to  100.000000
11/17/2010	1:45:05 PM	H2 MFC set to  0.000000
11/17/2010	1:45:05 PM	BCl3 MFC set to  0.000000
11/17/2010	1:45:05 PM	PHl3 MFC set to  0.000000
11/17/2010	1:45:05 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:45:05 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:45:05 PM	Tube furnace set to 0
11/17/2010	1:46:05 PM	Helium valve closed
11/17/2010	1:46:05 PM	H2 valve closed
11/17/2010	1:46:05 PM	BCl3 valve closed
11/17/2010	1:46:05 PM	PH3 valve closed
11/17/2010	1:46:05 PM	SiCl4 pre valve closed
11/17/2010	1:46:05 PM	SiCl4 post valve closed
11/17/2010	1:46:05 PM	Bubbler valve closed
11/17/2010	1:46:05 PM	Main Vac valve opened
11/17/2010	1:46:05 PM	Bypass valve opened
11/17/2010	1:46:05 PM	Helium MFC set to  0.000000
11/17/2010	1:46:05 PM	H2 MFC set to  0.000000
11/17/2010	1:46:05 PM	BCl3 MFC set to  0.000000
11/17/2010	1:46:05 PM	PHl3 MFC set to  0.000000
11/17/2010	1:46:05 PM	SiCl4 MFC set to  0.000000
11/17/2010	1:46:05 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	1:46:05 PM	Tube furnace set to 0
11/17/2010	1:46:06 PM	Run finished at 1:46 PM
11/17/2010	1:46:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	2:05:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	2:05:33 PM	Recipe started at 2:05 PM
11/17/2010	2:05:33 PM	Helium valve closed
11/17/2010	2:05:33 PM	H2 valve closed
11/17/2010	2:05:33 PM	BCl3 valve closed
11/17/2010	2:05:33 PM	PH3 valve closed
11/17/2010	2:05:33 PM	SiCl4 pre valve closed
11/17/2010	2:05:33 PM	SiCl4 post valve closed
11/17/2010	2:05:33 PM	Main Vac valve closed
11/17/2010	2:05:33 PM	Bubbler valve closed
11/17/2010	2:05:33 PM	Bypass valve opened
11/17/2010	2:05:33 PM	Helium MFC set to  0.000000
11/17/2010	2:05:33 PM	H2 MFC set to  0.000000
11/17/2010	2:05:33 PM	BCl3 MFC set to  0.000000
11/17/2010	2:05:33 PM	PHl3 MFC set to  0.000000
11/17/2010	2:05:33 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:05:34 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:05:34 PM	Tube furnace set to 0
11/17/2010	2:05:34 PM	Helium valve closed
11/17/2010	2:05:34 PM	H2 valve closed
11/17/2010	2:05:34 PM	BCl3 valve closed
11/17/2010	2:05:34 PM	PH3 valve closed
11/17/2010	2:05:34 PM	SiCl4 pre valve closed
11/17/2010	2:05:34 PM	SiCl4 post valve closed
11/17/2010	2:05:34 PM	Bubbler valve closed
11/17/2010	2:05:34 PM	Main Vac valve opened
11/17/2010	2:05:34 PM	Bypass valve opened
11/17/2010	2:05:34 PM	Helium MFC set to  0.000000
11/17/2010	2:05:34 PM	H2 MFC set to  0.000000
11/17/2010	2:05:34 PM	BCl3 MFC set to  0.000000
11/17/2010	2:05:34 PM	PHl3 MFC set to  0.000000
11/17/2010	2:05:34 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:05:34 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:05:34 PM	Tube furnace set to 0
11/17/2010	2:06:34 PM	H2 valve closed
11/17/2010	2:06:34 PM	BCl3 valve closed
11/17/2010	2:06:34 PM	PH3 valve closed
11/17/2010	2:06:34 PM	SiCl4 pre valve closed
11/17/2010	2:06:34 PM	SiCl4 post valve closed
11/17/2010	2:06:34 PM	Bubbler valve closed
11/17/2010	2:06:34 PM	Helium valve opened
11/17/2010	2:06:34 PM	Main Vac valve opened
11/17/2010	2:06:34 PM	Bypass valve opened
11/17/2010	2:06:34 PM	Helium MFC set to  100.000000
11/17/2010	2:06:34 PM	H2 MFC set to  0.000000
11/17/2010	2:06:34 PM	BCl3 MFC set to  0.000000
11/17/2010	2:06:34 PM	PHl3 MFC set to  0.000000
11/17/2010	2:06:34 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:06:34 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:06:34 PM	Tube furnace set to 0
11/17/2010	2:07:34 PM	Helium valve closed
11/17/2010	2:07:34 PM	H2 valve closed
11/17/2010	2:07:34 PM	BCl3 valve closed
11/17/2010	2:07:34 PM	PH3 valve closed
11/17/2010	2:07:34 PM	SiCl4 pre valve closed
11/17/2010	2:07:34 PM	SiCl4 post valve closed
11/17/2010	2:07:34 PM	Bubbler valve closed
11/17/2010	2:07:34 PM	Main Vac valve opened
11/17/2010	2:07:34 PM	Bypass valve opened
11/17/2010	2:07:34 PM	Helium MFC set to  0.000000
11/17/2010	2:07:34 PM	H2 MFC set to  0.000000
11/17/2010	2:07:34 PM	BCl3 MFC set to  0.000000
11/17/2010	2:07:34 PM	PHl3 MFC set to  0.000000
11/17/2010	2:07:34 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:07:34 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:07:34 PM	Tube furnace set to 0
11/17/2010	2:08:35 PM	H2 valve closed
11/17/2010	2:08:35 PM	BCl3 valve closed
11/17/2010	2:08:35 PM	PH3 valve closed
11/17/2010	2:08:35 PM	SiCl4 pre valve closed
11/17/2010	2:08:35 PM	SiCl4 post valve closed
11/17/2010	2:08:35 PM	Bubbler valve closed
11/17/2010	2:08:35 PM	Helium valve opened
11/17/2010	2:08:35 PM	Main Vac valve opened
11/17/2010	2:08:35 PM	Bypass valve opened
11/17/2010	2:08:35 PM	Helium MFC set to  100.000000
11/17/2010	2:08:35 PM	H2 MFC set to  0.000000
11/17/2010	2:08:35 PM	BCl3 MFC set to  0.000000
11/17/2010	2:08:35 PM	PHl3 MFC set to  0.000000
11/17/2010	2:08:35 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:08:35 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:08:35 PM	Tube furnace set to 0
11/17/2010	2:09:35 PM	Helium valve closed
11/17/2010	2:09:35 PM	H2 valve closed
11/17/2010	2:09:35 PM	BCl3 valve closed
11/17/2010	2:09:35 PM	PH3 valve closed
11/17/2010	2:09:35 PM	SiCl4 pre valve closed
11/17/2010	2:09:35 PM	SiCl4 post valve closed
11/17/2010	2:09:35 PM	Bubbler valve closed
11/17/2010	2:09:35 PM	Main Vac valve opened
11/17/2010	2:09:35 PM	Bypass valve opened
11/17/2010	2:09:35 PM	Helium MFC set to  0.000000
11/17/2010	2:09:35 PM	H2 MFC set to  0.000000
11/17/2010	2:09:35 PM	BCl3 MFC set to  0.000000
11/17/2010	2:09:35 PM	PHl3 MFC set to  0.000000
11/17/2010	2:09:35 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:09:35 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:09:35 PM	Tube furnace set to 0
11/17/2010	2:10:35 PM	H2 valve closed
11/17/2010	2:10:35 PM	BCl3 valve closed
11/17/2010	2:10:35 PM	PH3 valve closed
11/17/2010	2:10:35 PM	SiCl4 pre valve closed
11/17/2010	2:10:35 PM	SiCl4 post valve closed
11/17/2010	2:10:35 PM	Bubbler valve closed
11/17/2010	2:10:35 PM	Helium valve opened
11/17/2010	2:10:35 PM	Main Vac valve opened
11/17/2010	2:10:35 PM	Bypass valve opened
11/17/2010	2:10:35 PM	Helium MFC set to  100.000000
11/17/2010	2:10:35 PM	H2 MFC set to  0.000000
11/17/2010	2:10:35 PM	BCl3 MFC set to  0.000000
11/17/2010	2:10:35 PM	PHl3 MFC set to  0.000000
11/17/2010	2:10:35 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:10:35 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:10:35 PM	Tube furnace set to 0
11/17/2010	2:11:35 PM	Helium valve closed
11/17/2010	2:11:35 PM	H2 valve closed
11/17/2010	2:11:35 PM	BCl3 valve closed
11/17/2010	2:11:35 PM	PH3 valve closed
11/17/2010	2:11:35 PM	SiCl4 pre valve closed
11/17/2010	2:11:35 PM	SiCl4 post valve closed
11/17/2010	2:11:35 PM	Bubbler valve closed
11/17/2010	2:11:35 PM	Main Vac valve opened
11/17/2010	2:11:35 PM	Bypass valve opened
11/17/2010	2:11:35 PM	Helium MFC set to  0.000000
11/17/2010	2:11:35 PM	H2 MFC set to  0.000000
11/17/2010	2:11:35 PM	BCl3 MFC set to  0.000000
11/17/2010	2:11:35 PM	PHl3 MFC set to  0.000000
11/17/2010	2:11:35 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:11:35 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:11:35 PM	Tube furnace set to 0
11/17/2010	2:12:35 PM	H2 valve closed
11/17/2010	2:12:35 PM	BCl3 valve closed
11/17/2010	2:12:35 PM	PH3 valve closed
11/17/2010	2:12:35 PM	SiCl4 pre valve closed
11/17/2010	2:12:35 PM	SiCl4 post valve closed
11/17/2010	2:12:35 PM	Bubbler valve closed
11/17/2010	2:12:35 PM	Helium valve opened
11/17/2010	2:12:35 PM	Main Vac valve opened
11/17/2010	2:12:35 PM	Bypass valve opened
11/17/2010	2:12:35 PM	Helium MFC set to  100.000000
11/17/2010	2:12:35 PM	H2 MFC set to  0.000000
11/17/2010	2:12:35 PM	BCl3 MFC set to  0.000000
11/17/2010	2:12:35 PM	PHl3 MFC set to  0.000000
11/17/2010	2:12:35 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:12:35 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:12:35 PM	Tube furnace set to 0
11/17/2010	2:13:35 PM	Helium valve closed
11/17/2010	2:13:35 PM	H2 valve closed
11/17/2010	2:13:35 PM	BCl3 valve closed
11/17/2010	2:13:36 PM	PH3 valve closed
11/17/2010	2:13:36 PM	SiCl4 pre valve closed
11/17/2010	2:13:36 PM	SiCl4 post valve closed
11/17/2010	2:13:36 PM	Bubbler valve closed
11/17/2010	2:13:36 PM	Main Vac valve opened
11/17/2010	2:13:36 PM	Bypass valve opened
11/17/2010	2:13:36 PM	Helium MFC set to  0.000000
11/17/2010	2:13:36 PM	H2 MFC set to  0.000000
11/17/2010	2:13:36 PM	BCl3 MFC set to  0.000000
11/17/2010	2:13:36 PM	PHl3 MFC set to  0.000000
11/17/2010	2:13:36 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:13:36 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:13:36 PM	Tube furnace set to 0
11/17/2010	2:14:36 PM	H2 valve closed
11/17/2010	2:14:36 PM	BCl3 valve closed
11/17/2010	2:14:36 PM	PH3 valve closed
11/17/2010	2:14:36 PM	SiCl4 pre valve closed
11/17/2010	2:14:36 PM	SiCl4 post valve closed
11/17/2010	2:14:36 PM	Bubbler valve closed
11/17/2010	2:14:36 PM	Helium valve opened
11/17/2010	2:14:36 PM	Main Vac valve opened
11/17/2010	2:14:36 PM	Bypass valve opened
11/17/2010	2:14:36 PM	Helium MFC set to  100.000000
11/17/2010	2:14:36 PM	H2 MFC set to  0.000000
11/17/2010	2:14:36 PM	BCl3 MFC set to  0.000000
11/17/2010	2:14:36 PM	PHl3 MFC set to  0.000000
11/17/2010	2:14:36 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:14:36 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:14:36 PM	Tube furnace set to 0
11/17/2010	2:15:36 PM	Helium valve closed
11/17/2010	2:15:36 PM	H2 valve closed
11/17/2010	2:15:36 PM	BCl3 valve closed
11/17/2010	2:15:36 PM	PH3 valve closed
11/17/2010	2:15:36 PM	SiCl4 pre valve closed
11/17/2010	2:15:36 PM	SiCl4 post valve closed
11/17/2010	2:15:36 PM	Bubbler valve closed
11/17/2010	2:15:36 PM	Main Vac valve opened
11/17/2010	2:15:36 PM	Bypass valve opened
11/17/2010	2:15:36 PM	Helium MFC set to  0.000000
11/17/2010	2:15:36 PM	H2 MFC set to  0.000000
11/17/2010	2:15:36 PM	BCl3 MFC set to  0.000000
11/17/2010	2:15:36 PM	PHl3 MFC set to  0.000000
11/17/2010	2:15:36 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:15:36 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:15:36 PM	Tube furnace set to 0
11/17/2010	2:16:36 PM	H2 valve closed
11/17/2010	2:16:36 PM	BCl3 valve closed
11/17/2010	2:16:36 PM	PH3 valve closed
11/17/2010	2:16:36 PM	SiCl4 pre valve closed
11/17/2010	2:16:36 PM	SiCl4 post valve closed
11/17/2010	2:16:36 PM	Bubbler valve closed
11/17/2010	2:16:36 PM	Helium valve opened
11/17/2010	2:16:36 PM	Main Vac valve opened
11/17/2010	2:16:36 PM	Bypass valve opened
11/17/2010	2:16:36 PM	Helium MFC set to  100.000000
11/17/2010	2:16:36 PM	H2 MFC set to  0.000000
11/17/2010	2:16:36 PM	BCl3 MFC set to  0.000000
11/17/2010	2:16:36 PM	PHl3 MFC set to  0.000000
11/17/2010	2:16:36 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:16:36 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:16:36 PM	Tube furnace set to 0
11/17/2010	2:17:36 PM	Helium valve closed
11/17/2010	2:17:36 PM	H2 valve closed
11/17/2010	2:17:36 PM	BCl3 valve closed
11/17/2010	2:17:36 PM	PH3 valve closed
11/17/2010	2:17:36 PM	SiCl4 pre valve closed
11/17/2010	2:17:36 PM	SiCl4 post valve closed
11/17/2010	2:17:36 PM	Bubbler valve closed
11/17/2010	2:17:36 PM	Main Vac valve opened
11/17/2010	2:17:36 PM	Bypass valve opened
11/17/2010	2:17:36 PM	Helium MFC set to  0.000000
11/17/2010	2:17:36 PM	H2 MFC set to  0.000000
11/17/2010	2:17:36 PM	BCl3 MFC set to  0.000000
11/17/2010	2:17:36 PM	PHl3 MFC set to  0.000000
11/17/2010	2:17:36 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:17:36 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:17:36 PM	Tube furnace set to 0
11/17/2010	2:18:36 PM	H2 valve closed
11/17/2010	2:18:36 PM	BCl3 valve closed
11/17/2010	2:18:36 PM	PH3 valve closed
11/17/2010	2:18:36 PM	SiCl4 pre valve closed
11/17/2010	2:18:36 PM	SiCl4 post valve closed
11/17/2010	2:18:36 PM	Bubbler valve closed
11/17/2010	2:18:36 PM	Helium valve opened
11/17/2010	2:18:36 PM	Main Vac valve opened
11/17/2010	2:18:36 PM	Bypass valve opened
11/17/2010	2:18:36 PM	Helium MFC set to  100.000000
11/17/2010	2:18:36 PM	H2 MFC set to  0.000000
11/17/2010	2:18:36 PM	BCl3 MFC set to  0.000000
11/17/2010	2:18:36 PM	PHl3 MFC set to  0.000000
11/17/2010	2:18:36 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:18:37 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:18:37 PM	Tube furnace set to 0
11/17/2010	2:19:37 PM	Helium valve closed
11/17/2010	2:19:37 PM	H2 valve closed
11/17/2010	2:19:37 PM	BCl3 valve closed
11/17/2010	2:19:37 PM	PH3 valve closed
11/17/2010	2:19:37 PM	SiCl4 pre valve closed
11/17/2010	2:19:37 PM	SiCl4 post valve closed
11/17/2010	2:19:37 PM	Bubbler valve closed
11/17/2010	2:19:37 PM	Main Vac valve opened
11/17/2010	2:19:37 PM	Bypass valve opened
11/17/2010	2:19:37 PM	Helium MFC set to  0.000000
11/17/2010	2:19:37 PM	H2 MFC set to  0.000000
11/17/2010	2:19:37 PM	BCl3 MFC set to  0.000000
11/17/2010	2:19:37 PM	PHl3 MFC set to  0.000000
11/17/2010	2:19:37 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:19:37 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:19:37 PM	Tube furnace set to 0
11/17/2010	2:20:37 PM	H2 valve closed
11/17/2010	2:20:37 PM	BCl3 valve closed
11/17/2010	2:20:37 PM	PH3 valve closed
11/17/2010	2:20:37 PM	SiCl4 pre valve closed
11/17/2010	2:20:37 PM	SiCl4 post valve closed
11/17/2010	2:20:37 PM	Bubbler valve closed
11/17/2010	2:20:37 PM	Helium valve opened
11/17/2010	2:20:37 PM	Main Vac valve opened
11/17/2010	2:20:37 PM	Bypass valve opened
11/17/2010	2:20:37 PM	Helium MFC set to  100.000000
11/17/2010	2:20:37 PM	H2 MFC set to  0.000000
11/17/2010	2:20:37 PM	BCl3 MFC set to  0.000000
11/17/2010	2:20:37 PM	PHl3 MFC set to  0.000000
11/17/2010	2:20:37 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:20:37 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:20:37 PM	Tube furnace set to 0
11/17/2010	2:21:37 PM	Helium valve closed
11/17/2010	2:21:37 PM	H2 valve closed
11/17/2010	2:21:37 PM	BCl3 valve closed
11/17/2010	2:21:37 PM	PH3 valve closed
11/17/2010	2:21:37 PM	SiCl4 pre valve closed
11/17/2010	2:21:37 PM	SiCl4 post valve closed
11/17/2010	2:21:37 PM	Bubbler valve closed
11/17/2010	2:21:37 PM	Main Vac valve opened
11/17/2010	2:21:37 PM	Bypass valve opened
11/17/2010	2:21:37 PM	Helium MFC set to  0.000000
11/17/2010	2:21:37 PM	H2 MFC set to  0.000000
11/17/2010	2:21:37 PM	BCl3 MFC set to  0.000000
11/17/2010	2:21:37 PM	PHl3 MFC set to  0.000000
11/17/2010	2:21:37 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:21:37 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:21:37 PM	Tube furnace set to 0
11/17/2010	2:22:37 PM	H2 valve closed
11/17/2010	2:22:37 PM	BCl3 valve closed
11/17/2010	2:22:37 PM	PH3 valve closed
11/17/2010	2:22:37 PM	SiCl4 pre valve closed
11/17/2010	2:22:37 PM	SiCl4 post valve closed
11/17/2010	2:22:37 PM	Bubbler valve closed
11/17/2010	2:22:37 PM	Helium valve opened
11/17/2010	2:22:37 PM	Main Vac valve opened
11/17/2010	2:22:37 PM	Bypass valve opened
11/17/2010	2:22:37 PM	Helium MFC set to  100.000000
11/17/2010	2:22:37 PM	H2 MFC set to  0.000000
11/17/2010	2:22:37 PM	BCl3 MFC set to  0.000000
11/17/2010	2:22:37 PM	PHl3 MFC set to  0.000000
11/17/2010	2:22:37 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:22:37 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:22:37 PM	Tube furnace set to 0
11/17/2010	2:23:37 PM	Helium valve closed
11/17/2010	2:23:37 PM	H2 valve closed
11/17/2010	2:23:37 PM	BCl3 valve closed
11/17/2010	2:23:37 PM	PH3 valve closed
11/17/2010	2:23:37 PM	SiCl4 pre valve closed
11/17/2010	2:23:37 PM	SiCl4 post valve closed
11/17/2010	2:23:37 PM	Bubbler valve closed
11/17/2010	2:23:37 PM	Main Vac valve opened
11/17/2010	2:23:37 PM	Bypass valve opened
11/17/2010	2:23:37 PM	Helium MFC set to  0.000000
11/17/2010	2:23:37 PM	H2 MFC set to  0.000000
11/17/2010	2:23:37 PM	BCl3 MFC set to  0.000000
11/17/2010	2:23:37 PM	PHl3 MFC set to  0.000000
11/17/2010	2:23:37 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:23:37 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:23:38 PM	Tube furnace set to 0
11/17/2010	2:24:38 PM	H2 valve closed
11/17/2010	2:24:38 PM	BCl3 valve closed
11/17/2010	2:24:38 PM	PH3 valve closed
11/17/2010	2:24:38 PM	SiCl4 pre valve closed
11/17/2010	2:24:38 PM	SiCl4 post valve closed
11/17/2010	2:24:38 PM	Bubbler valve closed
11/17/2010	2:24:38 PM	Helium valve opened
11/17/2010	2:24:38 PM	Main Vac valve opened
11/17/2010	2:24:38 PM	Bypass valve opened
11/17/2010	2:24:38 PM	Helium MFC set to  100.000000
11/17/2010	2:24:38 PM	H2 MFC set to  0.000000
11/17/2010	2:24:38 PM	BCl3 MFC set to  0.000000
11/17/2010	2:24:38 PM	PHl3 MFC set to  0.000000
11/17/2010	2:24:38 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:24:38 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:24:38 PM	Tube furnace set to 0
11/17/2010	2:25:38 PM	Helium valve closed
11/17/2010	2:25:38 PM	H2 valve closed
11/17/2010	2:25:38 PM	BCl3 valve closed
11/17/2010	2:25:38 PM	PH3 valve closed
11/17/2010	2:25:38 PM	SiCl4 pre valve closed
11/17/2010	2:25:38 PM	SiCl4 post valve closed
11/17/2010	2:25:38 PM	Bubbler valve closed
11/17/2010	2:25:38 PM	Main Vac valve opened
11/17/2010	2:25:38 PM	Bypass valve opened
11/17/2010	2:25:38 PM	Helium MFC set to  0.000000
11/17/2010	2:25:38 PM	H2 MFC set to  0.000000
11/17/2010	2:25:38 PM	BCl3 MFC set to  0.000000
11/17/2010	2:25:38 PM	PHl3 MFC set to  0.000000
11/17/2010	2:25:38 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:25:38 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:25:38 PM	Tube furnace set to 0
11/17/2010	2:25:39 PM	Run finished at 2:25 PM
11/17/2010	2:25:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	2:50:35 PM	Recipe started at 2:50 PM
11/17/2010	2:50:35 PM	Helium valve closed
11/17/2010	2:50:35 PM	BCl3 valve closed
11/17/2010	2:50:35 PM	PH3 valve closed
11/17/2010	2:50:35 PM	SiCl4 pre valve closed
11/17/2010	2:50:35 PM	SiCl4 post valve closed
11/17/2010	2:50:35 PM	Main Vac valve closed
11/17/2010	2:50:35 PM	Bypass valve closed
11/17/2010	2:50:35 PM	Bubbler valve closed
11/17/2010	2:50:35 PM	H2 valve opened
11/17/2010	2:50:35 PM	Helium MFC set to  0.000000
11/17/2010	2:50:35 PM	H2 MFC set to  500.000000
11/17/2010	2:50:35 PM	BCl3 MFC set to  0.000000
11/17/2010	2:50:35 PM	PHl3 MFC set to  0.000000
11/17/2010	2:50:35 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:50:35 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:50:35 PM	Tube furnace set to 0
11/17/2010	2:51:56 PM	Helium valve closed
11/17/2010	2:51:56 PM	BCl3 valve closed
11/17/2010	2:51:56 PM	PH3 valve closed
11/17/2010	2:51:56 PM	SiCl4 pre valve closed
11/17/2010	2:51:56 PM	SiCl4 post valve closed
11/17/2010	2:51:56 PM	Main Vac valve closed
11/17/2010	2:51:56 PM	Bypass valve closed
11/17/2010	2:51:56 PM	H2 valve opened
11/17/2010	2:51:56 PM	Bubbler valve opened
11/17/2010	2:51:56 PM	Helium MFC set to  0.000000
11/17/2010	2:51:56 PM	H2 MFC set to  500.000000
11/17/2010	2:51:56 PM	BCl3 MFC set to  0.000000
11/17/2010	2:51:56 PM	PHl3 MFC set to  0.000000
11/17/2010	2:51:56 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:51:56 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	2:51:56 PM	Tube furnace set to 1000
11/17/2010	2:51:56 PM	Helium valve closed
11/17/2010	2:51:56 PM	H2 valve closed
11/17/2010	2:51:56 PM	BCl3 valve closed
11/17/2010	2:51:56 PM	PH3 valve closed
11/17/2010	2:51:56 PM	SiCl4 pre valve closed
11/17/2010	2:51:56 PM	SiCl4 post valve closed
11/17/2010	2:51:56 PM	Main Vac valve closed
11/17/2010	2:51:56 PM	Bubbler valve closed
11/17/2010	2:51:56 PM	Bypass valve closed
11/17/2010	2:51:56 PM	Helium MFC set to  0.000000
11/17/2010	2:51:56 PM	H2 MFC set to  0.000000
11/17/2010	2:51:56 PM	BCl3 MFC set to  0.000000
11/17/2010	2:51:56 PM	PHl3 MFC set to  0.000000
11/17/2010	2:51:56 PM	SiCl4 MFC set to  0.000000
11/17/2010	2:51:56 PM	Bypass solenoid MFC set to  760.000000
11/17/2010	2:51:57 PM	Tube furnace set to 0
11/17/2010	2:51:57 PM	Baratron reads 745.401633 Torr and NaOH valve is open.  Emergency exit.
11/17/2010	3:14:20 PM	Run aborted at 3:14 PM
11/17/2010	3:14:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	3:14:38 PM	Recipe started at 3:14 PM
11/17/2010	3:14:38 PM	Helium valve closed
11/17/2010	3:14:38 PM	H2 valve closed
11/17/2010	3:14:38 PM	BCl3 valve closed
11/17/2010	3:14:38 PM	PH3 valve closed
11/17/2010	3:14:38 PM	SiCl4 pre valve closed
11/17/2010	3:14:38 PM	SiCl4 post valve closed
11/17/2010	3:14:38 PM	Main Vac valve closed
11/17/2010	3:14:38 PM	Bubbler valve closed
11/17/2010	3:14:38 PM	Bypass valve opened
11/17/2010	3:14:38 PM	Helium MFC set to  0.000000
11/17/2010	3:14:38 PM	H2 MFC set to  0.000000
11/17/2010	3:14:38 PM	BCl3 MFC set to  0.000000
11/17/2010	3:14:38 PM	PHl3 MFC set to  0.000000
11/17/2010	3:14:38 PM	SiCl4 MFC set to  0.000000
11/17/2010	3:14:38 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	3:14:38 PM	Tube furnace set to 0
11/17/2010	3:15:00 PM	Helium valve closed
11/17/2010	3:15:00 PM	H2 valve closed
11/17/2010	3:15:00 PM	BCl3 valve closed
11/17/2010	3:15:00 PM	PH3 valve closed
11/17/2010	3:15:00 PM	SiCl4 pre valve closed
11/17/2010	3:15:00 PM	SiCl4 post valve closed
11/17/2010	3:15:00 PM	Bubbler valve closed
11/17/2010	3:15:00 PM	Main Vac valve opened
11/17/2010	3:15:00 PM	Bypass valve opened
11/17/2010	3:15:00 PM	Helium MFC set to  0.000000
11/17/2010	3:15:00 PM	H2 MFC set to  0.000000
11/17/2010	3:15:00 PM	BCl3 MFC set to  0.000000
11/17/2010	3:15:00 PM	PHl3 MFC set to  0.000000
11/17/2010	3:15:00 PM	SiCl4 MFC set to  0.000000
11/17/2010	3:15:00 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	3:15:01 PM	Tube furnace set to 0
11/17/2010	3:16:01 PM	H2 valve closed
11/17/2010	3:16:01 PM	BCl3 valve closed
11/17/2010	3:16:01 PM	PH3 valve closed
11/17/2010	3:16:01 PM	SiCl4 pre valve closed
11/17/2010	3:16:01 PM	SiCl4 post valve closed
11/17/2010	3:16:01 PM	Bubbler valve closed
11/17/2010	3:16:01 PM	Helium valve opened
11/17/2010	3:16:01 PM	Main Vac valve opened
11/17/2010	3:16:01 PM	Bypass valve opened
11/17/2010	3:16:01 PM	Helium MFC set to  100.000000
11/17/2010	3:16:01 PM	H2 MFC set to  0.000000
11/17/2010	3:16:01 PM	BCl3 MFC set to  0.000000
11/17/2010	3:16:01 PM	PHl3 MFC set to  0.000000
11/17/2010	3:16:01 PM	SiCl4 MFC set to  0.000000
11/17/2010	3:16:01 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	3:16:01 PM	Tube furnace set to 0
11/17/2010	3:17:01 PM	Helium valve closed
11/17/2010	3:17:01 PM	H2 valve closed
11/17/2010	3:17:01 PM	BCl3 valve closed
11/17/2010	3:17:01 PM	PH3 valve closed
11/17/2010	3:17:01 PM	SiCl4 pre valve closed
11/17/2010	3:17:01 PM	SiCl4 post valve closed
11/17/2010	3:17:01 PM	Bubbler valve closed
11/17/2010	3:17:01 PM	Main Vac valve opened
11/17/2010	3:17:01 PM	Bypass valve opened
11/17/2010	3:17:01 PM	Helium MFC set to  0.000000
11/17/2010	3:17:01 PM	H2 MFC set to  0.000000
11/17/2010	3:17:01 PM	BCl3 MFC set to  0.000000
11/17/2010	3:17:01 PM	PHl3 MFC set to  0.000000
11/17/2010	3:17:01 PM	SiCl4 MFC set to  0.000000
11/17/2010	3:17:01 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	3:17:01 PM	Tube furnace set to 0
11/17/2010	3:18:01 PM	H2 valve closed
11/17/2010	3:18:01 PM	BCl3 valve closed
11/17/2010	3:18:01 PM	PH3 valve closed
11/17/2010	3:18:01 PM	SiCl4 pre valve closed
11/17/2010	3:18:01 PM	SiCl4 post valve closed
11/17/2010	3:18:01 PM	Bubbler valve closed
11/17/2010	3:18:01 PM	Helium valve opened
11/17/2010	3:18:01 PM	Main Vac valve opened
11/17/2010	3:18:01 PM	Bypass valve opened
11/17/2010	3:18:01 PM	Helium MFC set to  100.000000
11/17/2010	3:18:01 PM	H2 MFC set to  0.000000
11/17/2010	3:18:01 PM	BCl3 MFC set to  0.000000
11/17/2010	3:18:01 PM	PHl3 MFC set to  0.000000
11/17/2010	3:18:01 PM	SiCl4 MFC set to  0.000000
11/17/2010	3:18:01 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	3:18:01 PM	Tube furnace set to 0
11/17/2010	3:18:06 PM	Helium valve closed
11/17/2010	3:18:06 PM	H2 valve closed
11/17/2010	3:18:06 PM	BCl3 valve closed
11/17/2010	3:18:06 PM	PH3 valve closed
11/17/2010	3:18:06 PM	SiCl4 pre valve closed
11/17/2010	3:18:06 PM	SiCl4 post valve closed
11/17/2010	3:18:06 PM	Bubbler valve closed
11/17/2010	3:18:06 PM	Main Vac valve opened
11/17/2010	3:18:06 PM	Bypass valve opened
11/17/2010	3:18:06 PM	Helium MFC set to  0.000000
11/17/2010	3:18:06 PM	H2 MFC set to  0.000000
11/17/2010	3:18:06 PM	BCl3 MFC set to  0.000000
11/17/2010	3:18:06 PM	PHl3 MFC set to  0.000000
11/17/2010	3:18:06 PM	SiCl4 MFC set to  0.000000
11/17/2010	3:18:06 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	3:18:06 PM	Tube furnace set to 0
11/17/2010	3:18:12 PM	Run aborted at 3:18 PM
11/17/2010	3:18:12 PM	Helium valve closed
11/17/2010	3:18:12 PM	H2 valve closed
11/17/2010	3:18:12 PM	BCl3 valve closed
11/17/2010	3:18:12 PM	PH3 valve closed
11/17/2010	3:18:12 PM	SiCl4 pre valve closed
11/17/2010	3:18:12 PM	SiCl4 post valve closed
11/17/2010	3:18:12 PM	Bypass valve closed
11/17/2010	3:18:12 PM	Main Vac valve closed
11/17/2010	3:18:12 PM	Bubbler valve closed
11/17/2010	3:18:12 PM	Helium MFC set to  0.000000
11/17/2010	3:18:12 PM	H2 MFC set to  0.000000
11/17/2010	3:18:12 PM	BCl3 MFC set to  0.000000
11/17/2010	3:18:12 PM	PHl3 MFC set to  0.000000
11/17/2010	3:18:12 PM	SiCl4 MFC set to  0.000000
11/17/2010	3:18:12 PM	Tube furnace set to 0
11/17/2010	3:18:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/17/2010	3:18:14 PM	Bypass valve opened
11/17/2010	3:18:15 PM	Main Vac valve opened
11/17/2010	3:18:49 PM	Recipe started at 3:18 PM
11/17/2010	3:18:49 PM	Helium valve closed
11/17/2010	3:18:49 PM	BCl3 valve closed
11/17/2010	3:18:49 PM	PH3 valve closed
11/17/2010	3:18:49 PM	SiCl4 pre valve closed
11/17/2010	3:18:49 PM	SiCl4 post valve closed
11/17/2010	3:18:49 PM	Main Vac valve closed
11/17/2010	3:18:49 PM	Bypass valve closed
11/17/2010	3:18:49 PM	Bubbler valve closed
11/17/2010	3:18:49 PM	H2 valve opened
11/17/2010	3:18:49 PM	Helium MFC set to  0.000000
11/17/2010	3:18:49 PM	H2 MFC set to  500.000000
11/17/2010	3:18:49 PM	BCl3 MFC set to  0.000000
11/17/2010	3:18:49 PM	PHl3 MFC set to  0.000000
11/17/2010	3:18:49 PM	SiCl4 MFC set to  0.000000
11/17/2010	3:18:49 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	3:18:49 PM	Tube furnace set to 0
11/17/2010	3:20:10 PM	Helium valve closed
11/17/2010	3:20:10 PM	BCl3 valve closed
11/17/2010	3:20:10 PM	PH3 valve closed
11/17/2010	3:20:10 PM	SiCl4 pre valve closed
11/17/2010	3:20:10 PM	SiCl4 post valve closed
11/17/2010	3:20:10 PM	Main Vac valve closed
11/17/2010	3:20:10 PM	Bypass valve closed
11/17/2010	3:20:10 PM	H2 valve opened
11/17/2010	3:20:10 PM	Bubbler valve opened
11/17/2010	3:20:10 PM	Helium MFC set to  0.000000
11/17/2010	3:20:10 PM	H2 MFC set to  500.000000
11/17/2010	3:20:10 PM	BCl3 MFC set to  0.000000
11/17/2010	3:20:10 PM	PHl3 MFC set to  0.000000
11/17/2010	3:20:10 PM	SiCl4 MFC set to  0.000000
11/17/2010	3:20:10 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	3:20:10 PM	Tube furnace set to 1000
11/17/2010	3:40:10 PM	Helium valve closed
11/17/2010	3:40:10 PM	PH3 valve closed
11/17/2010	3:40:10 PM	Main Vac valve closed
11/17/2010	3:40:10 PM	Bypass valve closed
11/17/2010	3:40:10 PM	H2 valve opened
11/17/2010	3:40:10 PM	BCl3 valve opened
11/17/2010	3:40:10 PM	SiCl4 pre valve opened
11/17/2010	3:40:10 PM	SiCl4 post valve opened
11/17/2010	3:40:10 PM	Bubbler valve opened
11/17/2010	3:40:10 PM	Helium MFC set to  0.000000
11/17/2010	3:40:10 PM	H2 MFC set to  500.000000
11/17/2010	3:40:10 PM	BCl3 MFC set to  12.000000
11/17/2010	3:40:10 PM	PHl3 MFC set to  0.000000
11/17/2010	3:40:10 PM	SiCl4 MFC set to  50.000000
11/17/2010	3:40:10 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	3:40:10 PM	Tube furnace set to 1000
11/17/2010	3:55:10 PM	H2 valve closed
11/17/2010	3:55:10 PM	BCl3 valve closed
11/17/2010	3:55:10 PM	PH3 valve closed
11/17/2010	3:55:10 PM	SiCl4 pre valve closed
11/17/2010	3:55:10 PM	SiCl4 post valve closed
11/17/2010	3:55:10 PM	Main Vac valve closed
11/17/2010	3:55:10 PM	Bypass valve closed
11/17/2010	3:55:10 PM	Helium valve opened
11/17/2010	3:55:10 PM	Bubbler valve opened
11/17/2010	3:55:10 PM	Helium MFC set to  500.000000
11/17/2010	3:55:10 PM	H2 MFC set to  0.000000
11/17/2010	3:55:10 PM	BCl3 MFC set to  0.000000
11/17/2010	3:55:10 PM	PHl3 MFC set to  0.000000
11/17/2010	3:55:10 PM	SiCl4 MFC set to  0.000000
11/17/2010	3:55:10 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	3:55:11 PM	Tube furnace set to 950
11/17/2010	4:00:11 PM	H2 valve closed
11/17/2010	4:00:11 PM	BCl3 valve closed
11/17/2010	4:00:11 PM	PH3 valve closed
11/17/2010	4:00:11 PM	SiCl4 pre valve closed
11/17/2010	4:00:11 PM	SiCl4 post valve closed
11/17/2010	4:00:11 PM	Main Vac valve closed
11/17/2010	4:00:11 PM	Bypass valve closed
11/17/2010	4:00:11 PM	Helium valve opened
11/17/2010	4:00:11 PM	Bubbler valve opened
11/17/2010	4:00:11 PM	Helium MFC set to  500.000000
11/17/2010	4:00:11 PM	H2 MFC set to  0.000000
11/17/2010	4:00:11 PM	BCl3 MFC set to  0.000000
11/17/2010	4:00:11 PM	PHl3 MFC set to  0.000000
11/17/2010	4:00:11 PM	SiCl4 MFC set to  0.000000
11/17/2010	4:00:11 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	4:00:11 PM	Tube furnace set to 900
11/17/2010	4:05:11 PM	H2 valve closed
11/17/2010	4:05:11 PM	BCl3 valve closed
11/17/2010	4:05:11 PM	PH3 valve closed
11/17/2010	4:05:11 PM	SiCl4 pre valve closed
11/17/2010	4:05:11 PM	SiCl4 post valve closed
11/17/2010	4:05:11 PM	Main Vac valve closed
11/17/2010	4:05:11 PM	Bypass valve closed
11/17/2010	4:05:11 PM	Helium valve opened
11/17/2010	4:05:11 PM	Bubbler valve opened
11/17/2010	4:05:11 PM	Helium MFC set to  500.000000
11/17/2010	4:05:11 PM	H2 MFC set to  0.000000
11/17/2010	4:05:11 PM	BCl3 MFC set to  0.000000
11/17/2010	4:05:11 PM	PHl3 MFC set to  0.000000
11/17/2010	4:05:11 PM	SiCl4 MFC set to  0.000000
11/17/2010	4:05:11 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	4:05:11 PM	Tube furnace set to 850
11/17/2010	4:10:11 PM	H2 valve closed
11/17/2010	4:10:11 PM	BCl3 valve closed
11/17/2010	4:10:11 PM	PH3 valve closed
11/17/2010	4:10:11 PM	SiCl4 pre valve closed
11/17/2010	4:10:11 PM	SiCl4 post valve closed
11/17/2010	4:10:11 PM	Main Vac valve closed
11/17/2010	4:10:11 PM	Bypass valve closed
11/17/2010	4:10:11 PM	Helium valve opened
11/17/2010	4:10:11 PM	Bubbler valve opened
11/17/2010	4:10:11 PM	Helium MFC set to  500.000000
11/17/2010	4:10:11 PM	H2 MFC set to  0.000000
11/17/2010	4:10:11 PM	BCl3 MFC set to  0.000000
11/17/2010	4:10:11 PM	PHl3 MFC set to  0.000000
11/17/2010	4:10:11 PM	SiCl4 MFC set to  0.000000
11/17/2010	4:10:11 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	4:10:11 PM	Tube furnace set to 800
11/17/2010	4:15:11 PM	H2 valve closed
11/17/2010	4:15:11 PM	BCl3 valve closed
11/17/2010	4:15:11 PM	PH3 valve closed
11/17/2010	4:15:11 PM	SiCl4 pre valve closed
11/17/2010	4:15:11 PM	SiCl4 post valve closed
11/17/2010	4:15:11 PM	Main Vac valve closed
11/17/2010	4:15:11 PM	Bypass valve closed
11/17/2010	4:15:11 PM	Helium valve opened
11/17/2010	4:15:11 PM	Bubbler valve opened
11/17/2010	4:15:11 PM	Helium MFC set to  500.000000
11/17/2010	4:15:11 PM	H2 MFC set to  0.000000
11/17/2010	4:15:11 PM	BCl3 MFC set to  0.000000
11/17/2010	4:15:11 PM	PHl3 MFC set to  0.000000
11/17/2010	4:15:11 PM	SiCl4 MFC set to  0.000000
11/17/2010	4:15:11 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	4:15:11 PM	Tube furnace set to 750
11/17/2010	4:20:11 PM	H2 valve closed
11/17/2010	4:20:11 PM	BCl3 valve closed
11/17/2010	4:20:11 PM	PH3 valve closed
11/17/2010	4:20:11 PM	SiCl4 pre valve closed
11/17/2010	4:20:11 PM	SiCl4 post valve closed
11/17/2010	4:20:11 PM	Main Vac valve closed
11/17/2010	4:20:11 PM	Bypass valve closed
11/17/2010	4:20:11 PM	Helium valve opened
11/17/2010	4:20:11 PM	Bubbler valve opened
11/17/2010	4:20:11 PM	Helium MFC set to  500.000000
11/17/2010	4:20:11 PM	H2 MFC set to  0.000000
11/17/2010	4:20:11 PM	BCl3 MFC set to  0.000000
11/17/2010	4:20:11 PM	PHl3 MFC set to  0.000000
11/17/2010	4:20:11 PM	SiCl4 MFC set to  0.000000
11/17/2010	4:20:11 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	4:20:11 PM	Tube furnace set to 700
11/17/2010	4:25:11 PM	H2 valve closed
11/17/2010	4:25:11 PM	BCl3 valve closed
11/17/2010	4:25:11 PM	PH3 valve closed
11/17/2010	4:25:11 PM	SiCl4 pre valve closed
11/17/2010	4:25:11 PM	SiCl4 post valve closed
11/17/2010	4:25:11 PM	Main Vac valve closed
11/17/2010	4:25:11 PM	Bypass valve closed
11/17/2010	4:25:11 PM	Helium valve opened
11/17/2010	4:25:11 PM	Bubbler valve opened
11/17/2010	4:25:11 PM	Helium MFC set to  500.000000
11/17/2010	4:25:12 PM	H2 MFC set to  0.000000
11/17/2010	4:25:12 PM	BCl3 MFC set to  0.000000
11/17/2010	4:25:12 PM	PHl3 MFC set to  0.000000
11/17/2010	4:25:12 PM	SiCl4 MFC set to  0.000000
11/17/2010	4:25:12 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	4:25:12 PM	Tube furnace set to 0
11/17/2010	4:45:12 PM	Helium valve closed
11/17/2010	4:45:12 PM	H2 valve closed
11/17/2010	4:45:12 PM	BCl3 valve closed
11/17/2010	4:45:12 PM	PH3 valve closed
11/17/2010	4:45:12 PM	SiCl4 pre valve closed
11/17/2010	4:45:12 PM	SiCl4 post valve closed
11/17/2010	4:45:12 PM	Main Vac valve closed
11/17/2010	4:45:12 PM	Bypass valve closed
11/17/2010	4:45:12 PM	Bubbler valve closed
11/17/2010	4:45:12 PM	Helium MFC set to  0.000000
11/17/2010	4:45:12 PM	H2 MFC set to  0.000000
11/17/2010	4:45:12 PM	BCl3 MFC set to  0.000000
11/17/2010	4:45:12 PM	PHl3 MFC set to  0.000000
11/17/2010	4:45:12 PM	SiCl4 MFC set to  0.000000
11/17/2010	4:45:12 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	4:45:12 PM	Tube furnace set to 0
11/17/2010	4:45:12 PM	Run finished at 4:45 PM
11/17/2010	5:26:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/17/2010	5:26:39 PM	Recipe started at 5:26 PM
11/17/2010	5:26:39 PM	H2 valve closed
11/17/2010	5:26:39 PM	BCl3 valve closed
11/17/2010	5:26:39 PM	PH3 valve closed
11/17/2010	5:26:39 PM	SiCl4 pre valve closed
11/17/2010	5:26:39 PM	SiCl4 post valve closed
11/17/2010	5:26:39 PM	Main Vac valve closed
11/17/2010	5:26:39 PM	Bypass valve closed
11/17/2010	5:26:39 PM	Bubbler valve closed
11/17/2010	5:26:39 PM	Helium valve opened
11/17/2010	5:26:39 PM	Helium MFC set to  500.000000
11/17/2010	5:26:39 PM	H2 MFC set to  0.000000
11/17/2010	5:26:39 PM	BCl3 MFC set to  0.000000
11/17/2010	5:26:39 PM	PHl3 MFC set to  0.000000
11/17/2010	5:26:39 PM	SiCl4 MFC set to  0.000000
11/17/2010	5:26:39 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	5:26:39 PM	Tube furnace set to 0
11/17/2010	5:26:40 PM	Helium valve closed
11/17/2010	5:26:40 PM	H2 valve closed
11/17/2010	5:26:40 PM	BCl3 valve closed
11/17/2010	5:26:40 PM	PH3 valve closed
11/17/2010	5:26:40 PM	SiCl4 pre valve closed
11/17/2010	5:26:40 PM	SiCl4 post valve closed
11/17/2010	5:26:40 PM	Main Vac valve closed
11/17/2010	5:26:40 PM	Bypass valve closed
11/17/2010	5:26:40 PM	Bubbler valve closed
11/17/2010	5:26:40 PM	Helium MFC set to  0.000000
11/17/2010	5:26:40 PM	H2 MFC set to  0.000000
11/17/2010	5:26:40 PM	BCl3 MFC set to  0.000000
11/17/2010	5:26:40 PM	PHl3 MFC set to  0.000000
11/17/2010	5:26:40 PM	SiCl4 MFC set to  0.000000
11/17/2010	5:26:40 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	5:26:40 PM	Tube furnace set to 0
11/17/2010	5:26:40 PM	Run finished at 5:26 PM
11/17/2010	5:26:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/17/2010	5:26:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2010	5:26:45 PM	Recipe started at 5:26 PM
11/17/2010	5:26:45 PM	Helium valve closed
11/17/2010	5:26:45 PM	H2 valve closed
11/17/2010	5:26:45 PM	BCl3 valve closed
11/17/2010	5:26:45 PM	PH3 valve closed
11/17/2010	5:26:45 PM	SiCl4 pre valve closed
11/17/2010	5:26:45 PM	SiCl4 post valve closed
11/17/2010	5:26:45 PM	Main Vac valve closed
11/17/2010	5:26:45 PM	Bubbler valve closed
11/17/2010	5:26:45 PM	Bypass valve opened
11/17/2010	5:26:45 PM	Helium MFC set to  0.000000
11/17/2010	5:26:45 PM	H2 MFC set to  0.000000
11/17/2010	5:26:45 PM	BCl3 MFC set to  0.000000
11/17/2010	5:26:45 PM	PHl3 MFC set to  0.000000
11/17/2010	5:26:45 PM	SiCl4 MFC set to  0.000000
11/17/2010	5:26:45 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	5:26:45 PM	Tube furnace set to 0
11/17/2010	5:27:34 PM	Helium valve closed
11/17/2010	5:27:34 PM	H2 valve closed
11/17/2010	5:27:34 PM	BCl3 valve closed
11/17/2010	5:27:34 PM	PH3 valve closed
11/17/2010	5:27:34 PM	SiCl4 pre valve closed
11/17/2010	5:27:34 PM	SiCl4 post valve closed
11/17/2010	5:27:34 PM	Bubbler valve closed
11/17/2010	5:27:34 PM	Main Vac valve opened
11/17/2010	5:27:34 PM	Bypass valve opened
11/17/2010	5:27:34 PM	Helium MFC set to  0.000000
11/17/2010	5:27:34 PM	H2 MFC set to  0.000000
11/17/2010	5:27:34 PM	BCl3 MFC set to  0.000000
11/17/2010	5:27:34 PM	PHl3 MFC set to  0.000000
11/17/2010	5:27:34 PM	SiCl4 MFC set to  0.000000
11/17/2010	5:27:34 PM	Bypass solenoid MFC set to  0.000000
11/17/2010	5:27:34 PM	Tube furnace set to 0
11/17/2010	5:27:34 PM	Run finished at 5:27 PM
11/17/2010	5:27:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/17/2010	5:36:55 PM	SiCl4 post valve opened
11/17/2010	5:37:33 PM	Helium valve opened
11/17/2010	5:37:41 PM	Helium MFC set to  500.000000
11/17/2010	5:39:45 PM	SiCl4 MFC set to  50.000000
11/17/2010	5:39:46 PM	SiCl4 pre valve opened
11/17/2010	5:43:05 PM	SiCl4 post valve closed
11/17/2010	5:43:05 PM	SiCl4 pre valve closed
11/17/2010	5:43:06 PM	Helium valve closed
11/17/2010	5:43:09 PM	SiCl4 MFC set to  0.000000
11/17/2010	5:43:11 PM	Helium MFC set to  0.000000
11/17/2010	5:52:28 PM	SiCl4 post valve opened
11/17/2010	5:52:44 PM	SiCl4 pre valve opened
11/17/2010	5:52:46 PM	SiCl4 MFC set to  50.000000
11/17/2010	5:52:48 PM	Helium valve opened
11/17/2010	5:52:51 PM	Helium MFC set to  500.000000
11/17/2010	5:53:28 PM	Helium valve closed
11/17/2010	5:53:29 PM	SiCl4 pre valve closed
11/17/2010	5:53:43 PM	Helium valve opened
11/17/2010	5:53:44 PM	SiCl4 pre valve opened
11/17/2010	5:55:11 PM	Helium valve closed
11/17/2010	5:55:12 PM	SiCl4 pre valve closed
11/17/2010	5:55:28 PM	Helium MFC set to  100.000000
11/17/2010	5:55:29 PM	Helium valve opened
11/17/2010	5:55:36 PM	Helium MFC set to  500.000000
11/17/2010	5:55:37 PM	SiCl4 pre valve opened
11/17/2010	5:57:40 PM	Helium valve closed
11/17/2010	5:57:40 PM	SiCl4 pre valve closed
11/17/2010	5:57:59 PM	Helium MFC set to  5.000000
11/17/2010	5:58:00 PM	Helium valve opened
11/17/2010	5:58:06 PM	Helium MFC set to  500.000000
11/17/2010	5:58:07 PM	SiCl4 pre valve opened
11/17/2010	6:07:16 PM	Helium valve closed
11/17/2010	6:07:17 PM	SiCl4 pre valve closed
11/17/2010	6:07:49 PM	Helium MFC set to  5.000000
11/17/2010	6:07:50 PM	Helium valve opened
11/17/2010	6:07:55 PM	Helium MFC set to  500.000000
11/17/2010	6:07:56 PM	SiCl4 pre valve opened
